An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen.

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

Rotary Clamp Cylinders

Indicator light Auto switch model Perpendicular In-line DC AC Load voltage Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable load Type Special function Electrical entry Wiring (Output) Pre-wired connector 1 (M) 20 to 63 12, 16 20 to 63 12, 16 M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA F79F P4DW M9NV M9PV M9BV 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 2-wire 12 V

5

, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 1 90 95 110 115 120 2 (Different surfaces, same surface) 100 105 120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 125 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 130 +

Air Cylinder Series CA2

= 4, 8, 12, 16) (n = 4, 8, 12, 16) 95 2 (Different surfaces and same surface) 1 20 100 105 110 D-Y7BAL n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 20 + 45 (n 2) 2 95 + 45 (n 4) 2 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 120 15 130 140 D-P4DWL 140 + 65 (n 4) 2 (n = 4, 8, 12, 16) (n = 2,

Compact Cylinder Series CQS

11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 5.5 6 10 11 9.5 9 14 16 -X Individual -X Note 1) The product is shipped out of the factory in installation state a).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Compact Cylinder

16 30 35 40 45 45 55 22 26 32.5 38 46.5 56.5 72 89 22 22 24.5 26 31 31 38.5 45 7 7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72

Solid State Auto Switches

Weight (g) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 24 48 96 24 48 24 48 Lead wire length Dimensions (mm) 6 14 6 4.5 5 12 22 Indicator light 12 33 D-A64/A67 without indicator light DD4 16 11 16 Most sensitive position 1639 Reed Auto Switch Tie-rod Mounting Style D-A33C/D-A34C/D-A44C Refer to SMC website for the details of the products conforming to the

Electric Actuator

(Refer to page 16.)

155

-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06

Compact Cylinder

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

24

16 20 16 16 12 12 1 1 12 12 MGJ JMGP 0.1 10 30 50 51 100 300 200 0.1 10 30 50 51 100 300 200 MGP MGP Stroke [mm] Stroke [mm] MGPW MGQ (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 50 50 MGG 100 100 100 100 80 80 MGC 80 80 63 63 MGF 50, 63 50, 63 50 50 MGZ 10 10 40 40 40 40 MGT 5 5 32 32 Load mass m [kg] Load mass m [kg] 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

85 + 40 (n 4) /2 n = 4, 8, 12, 16 90 + 40 (n 4) /2 n = 4, 8, 12, 16 95 + 40 (n 4) /2 n = 4, 8, 12, 16 105 + 40 (n 4) /2 n = 4, 8, 12, 16 2 (Different surfaces, Same surface) 1 50 55 60 65 70 80 D-M9mV D-M9mWV n 50 + 30 (n 4) /2 n = 4, 8, 12, 16 55 + 30 (n 4) /2 n = 4, 8, 12, 16 60 + 30 (n 4) /2 n = 4, 8, 12, 16 65 + 30 (n 4) /2 n = 4, 8, 12, 16 70 + 30 (n 4) /2 n = 4, 8, 12, 16

10

4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100. Note 2) D-A5, A6, A59W, Z7, Z80 cannot be mounted to 32.