Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)

HRX-OM-K003

set at 1C.

Table of Contents

Switch 5 to 24VDC Load current (1C): 100mA, Internal voltage drop: 0.8V or less Load current (1C): 40mA, Internal voltage drop: 0.4V or less Specifications Note) When the work load exceeds 15kg, the speed may be limited. Contact SMC in this case.

Electric Actuators

Switch 5 to 24VDC Load current (1C): 100mA, Internal voltage drop: 0.8V or less Load current (1C): 40mA, Internal voltage drop: 0.4V or less Specifications Note) When the work load exceeds 15kg, the speed may be limited. Contact SMC in this case.

LG1H

Switch 5 to 24VDC Load current (1C): 100mA, Internal voltage drop: 0.8V or less Load current (1C): 40mA, Internal voltage drop: 0.4V or less Specifications Note) When the work load exceeds 15kg, the speed may be limited. Contact SMC in this case.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

HRX-OM-M005

Once the discharge temperature of the circulating fluid becomes 31C, 1C-thermal dissipation occurs to allow the circulating fluid in your system to be 30C. TEMP SP value is obtained for your system. Note that 31C is recorded in TEMP PV and communication data.

Series IDG

For each increase of 1C in the inlet air temperature, the outlet air atmospheric pressure dew point increases by approximately 0.8C.

HRX-OM-I051

Once the discharge temperature of the circulating fluid becomes 31C, 1C-thermal dissipation is assured to allow the circulating fluid in your system to be 30C. TEMP SP value is obtained for your system. Note that 31C is recorded in TEMP PV and communication data.

2

For other models, when the tube length is 5 meters or less, a rise of the outlet air atmospheric pressure dew point will be 1C or less.

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

JXCx-OMT0023

Alarm No.: A.1C Name: Software combination error Description Software checksum error Detailed Detailed Name Cause Checking method Result Action display 1C.1 Software combination error 1) Flash-ROM fault Remove all cables except for the control circuit power supply and check if the alarm occurs. Alarm occurs. Replace the driver.

SY

solenoid/ 3 position SY9000 SY9000-37-1B Series SY9000-37-2B 9 SY9000 Single solenoid with spacer assembly SY9000-37-3B Type of actuation Double solenoid/3 position with spacer assembly 1 2 position single 2 2 position double SY9000-37-4B 3 3 position closed center For 110VAC (115VAC) 4 3 position exhaust center Specification Single solenoid Double solenoid/ 3 position SY9000 SY9000-37-1C

AC Servo Motor Driver (Pulse input type/Positioning type ）

24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY SY 8 One-touch fitting 8 One-touch fitting SY3000-55-1B-Q SY3000-54-1C-Q 6 One-touch fitting SY3000-54-2C-Q Series SY5000 SYJ Series SY5000 Port size Assembly No. Port size Assembly No. 10 One-touch fitting SY5000-55-1B-Q SX 10 One-touch fitting SY5000-54-1C-Q Series SY7000 Series SY7000 Port size VK Assembly No.