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Part Number Description: HIGH VACUUM GATE VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Click here to report information errorImage shown may not match exact part number

2

Power consumption of the standard model under the same conditions 2C Normal operation mode 71% reduced 71% reduced Double energy saving function series Winter Ambient temperature: 2C Inlet air temperature: 10C Set dew point: 10C Conditions Energy saving operation mode Summer40C 38% reduced 38% reduced Double energy saving function series Ambient temperature: 40C Inlet air temperature: 50C

DOC1001322

Pump automatically continues operating until the circulating fluid temperature rises up to +2C, which is the warming-up setting temperature. Pump automatically stops operating when the circulating fluid temperature rises up to +2C which is the warming-up setting temperature.

HRX-OM-W060

Pump automatically continues operating until the circulating fluid temperature rises up to +2C, which is the warming-up setting temperature. Pump automatically stops operating when the circulating fluid temperature rises up to +2C which is the warming-up setting temperature.

HRX-OM-Y098

OFF 2 2C/45C Check the environment.

HRX-OM-X037

OFF 2 2C/45C Check the environment.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

Compressed Air Cleaning Filter Series

AM-SA002 Drain guide Drain cock 2C to 22C 2B to 37B 150C to 550C 150 to 650 AM-SA003 Auto drains cannot be replaced alone since those cannot be assembled without dedicated assembly tools. The entire bowl assembly must be replaced. (Refer to How to Order Bowl Assembly on page 63.)

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

7

W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

HRX-OM-M005

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +22C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

HRX-OM-K003

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

SY

9 SY9000 Single solenoid with spacer assembly SY9000-37-3B Type of actuation Double solenoid/3 position with spacer assembly 1 2 position single 2 2 position double SY9000-37-4B 3 3 position closed center For 110VAC (115VAC) 4 3 position exhaust center Specification Single solenoid Double solenoid/ 3 position SY9000 SY9000-37-1C 5 3 position pressure center Pilot specification SY9000-37-2C

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Air Cylinder Series CM2

-X Individual -X Technical data 133 Series CM2 Rubber bumper Boss-cut style Clevis integrated style Air-hydro With air cushion Built-in One-touch fittings Component Parts Material Note Description Material Note Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Description No. 12 13 14 15 16 17 No. 1 2A 2B 2C 3 4 5 6 7 8 9 10 11 Rod cover Head cover A Head cover B Head cover C Cylinder

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

Air Cylinder

Description Material Note 1 Rod cover Aluminum alloy Anodized 2A Head cover A Aluminum alloy Anodized 2B Head cover B Aluminum alloy Anodized 2C Head cover C Aluminum alloy Anodized 3 Cylinder tube Stainless steel 4 Piston Aluminum alloy 5 Piston rod Carbon steel Hard chrome plating 6 Bushing Bearing alloy 7 Seal retainer Stainless steel 8 Return spring Steel wire Zinc chromated 9 Spring

AC Servo Motor Driver (Pulse input type/Positioning type ）

44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2 -0.6 A B C D E F 2A 2B 2C