Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL

Delivery Pressure: 50 [10 to 500 psig (0.07 to 3.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet: No

Delivery Pressure: 50 [10 to 500 psig (0.07 to 3.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No

Delivery Pressure: 50 [10 to 500 psig (0.07 to 3.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4P [4 Ports (1-In; 2-Out; 4-Gauge Port In; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Inlet: 0 (No Pressure Gauge,

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: No Gauge Port, Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: No Gauge Port, Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Extra Bottom; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: H [-30 in.Hg to 160 psig (-0.1 to 1.1 MPa)], Gauge Port, Inlet: No Gauge Port,

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Extra Bottom; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Extra Bottom; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: No Gauge Port

Rotary Table: High Precision Type

H=0.1 m Fs=20 N If MSUA7 is selected under those conditions, thrust load of 20N will be within the allowable value of 60N, Fig.3 but moment will be 20N X 0.1m=2Nm, and it exceeds the allowable moment of 0.9Nm, so that it can not be used.

E-MY2_E_D

Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate stopping position 0.1mm Nominal size:16 10N Allowable external resistance Nominal size:25 20N

A

T I P L O A D F O R 3 0 0 M M S T R O K E Local Production Available Bore MGGM MGGL Slide Bearing 20 20N 23N 25 26N 28N 32 42N 45N 40 65N 45N 50 110N 45N D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

R P 3.5 to 7 3 1 < >: AC 93.5 86 M plug connector (M) R P (Lead wire length) 3 1 87 300 83.5 98.5 Indicator light Cross section 0.23 mm2 Cover diameter 1.5 69.5 <74.5> R P 3 1 < >: AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 20n + 11 L2 = 20n + 36 2 51 76 3 71 96 4 91 116 5 111 136 6 131 156 7 151 176 8 171 196 9 191 216 10 211 236 ( ): A port Rc 1/8 Symbol L1 L2 VT VP Common exhaust: VV3Z4-50 (Built-in One-touch fittings manifold) (G) (L

VQZ1000/2000/3000

+ 10, L2 = 20n + 32 n: Stations (Maximum 20 stations) L n 2 50 72 100 110.5 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 6 130 152 175 185.5 7 150 172 200 210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 11 230 252 275 285.5 12 250 272 300 310.5 13 270 292 312.5 323 14 290 312 337.5 348 15 310 332 362.5 373 16 330 352 375 385.5 17 350 372 400 410.5 18 370 392

CATALOG

T I P L O A D F O R 3 0 0 M M S T R O K E Local Production Available Bore MGGM MGGL Slide Bearing 20 20N 23N 25 26N 28N FOR INFORMATION ON BORE SIZES 63, 80 AND 100MM, 32 42N 45N 40 65N 45N P L E A S E C O N S U L T S M C C U S T O M E R S E R V I C E 50 110N 45N D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

74.5 Indicator light 71<74.5> R2 R1 5 1 P 3 Cover diameter 1.5 Cross section 0.23mm2 100.5 93 75 < >: AC 1 P 5 3 R2 R1 M plug connector (M) 76.5 143.5 (3 Position)<145.5> 130 (Double)<132> 101.5 (Single)<102.5> Indicator light (Lead wire length) 76.5<81.5> 300 64.5<65.5> Cover diameter 1.5 Cross section 0.23mm2 5 1 P 3 R2 R1 < >: AC Dimensions n: Station (Max. 20 stations) Equation L1=20n