Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

LEC-OM069xx

Do not impose excessive bending force or tension. 3-14 3 Wiring and Connection 3.1.7 Specifications of motor cables and encoder cables Servo motor Rated Order No.

PSE530/200

SET To measuring mode 16-3-14 14 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 3: Special Setting 1 Precision indicator setting Refer to A Display calibration function on page 16-3-17 for details. Calibration mode + SET MPa Measuring mode kPa Press and hold for 2 seconds or longer.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

At a time of shipment from the factory, it is set such that the security code is not required. 14 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Modular F.R.L. Units

N.C.: Gray N.O.: Black B B B B B B B Dimensions Width across flats 14 1/8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Width across flats 14 1/8 M5 x 0.8 Applicable model AC25-B to AC60-B Optional/Semi-standard specifications Metal bowl Metal bowl with drain guide Metal bowl with level gauge Metal bowl with level gauge, with drain guide With drain guide

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." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

LEC-OM02904

LE--LE-CSM-AWG14 14 .

7ND9071en

L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Thermo-chiller/Rack Mount Type

L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

LUBRICATOR

Port thread Port thread Rc Rc G G NPT C2SL-6(Z)-A NPT C2SL-36(Z)-A C2SL-6-A C2SL-36-A Semi-standard Semi-standard C Semi-standard 3C Part no. Part no. Port thread Port thread Rc Rc G G NPT C2SL-C(Z)-A NPT C2SL-3C(Z)-A C2SL-C-A C2SL-3C-A B B External appearance drawing and part no. Semi-standard 6C Semi-standard 36C Part no. Part no.

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 52.5 39 28 28 14 5.3 3 5 5.5 SMC SMC SMC SMC 84 56 8 28 11.5 L2 dimension DIN rail part no.

Modular F.R.L. Units

Optional/Semi-standard specifications N.C.: Gray N.O.: Black B B B B B Dimensions Barb fitting Applicable tubing: T0604 Width across flats 14 1/8 Width across flats 17 1/4 M5 x 0.8 Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Model Standard specifications Bracket mount P1 P2 A B C E F G J M 30 41 41 50 50 Q1 24 35 35 40 40 Q2 33 R 5.5 7 7 9 9 S 12 14 14

HRL

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

Thermo-chiller

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature