4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 M5 x 0.8 Nil Rc Rc 1/8 VZ344(A), 2(B) port F G 20 20 stations 1(P) port M5 x 0.8 N NPT VZ35Rc 1/8 Z NPTE Applicable blanking plate assembly DXT192-13-1A Applicable individual EXH spacer assembly DXT192-21-1A Applicable

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

M5 C4 -Q C6 1 Includes 3pcs. of bushing assembly (SY3000-52-1A) SY360-Valve Ports P, R: With 8 One-touch fitting Includes 3pcs. of bushing assembly (SY3000-52-1A) 2 SY3000-55-1A-Q Supply/Exhaust block assembly 3 SY3000-56-1A-Q End block assembly For D side (bushing assembly: SY3000-52-1A not included) 4 SY3000-56-1B-Q End block assembly For U side (bushing assembly: SY3000-52-1A not included

4/5 Port Solenoid Valve

(For mounting) 3 11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN Terminal (D): 10-SYJ5 23-D-M5 3 4 5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7

2

size Applicable fitting size d Applicable fitting size d Weight (g) d 4 M5 x 0.8 KQ2N04-M5l 7 29.7 26.7 13.4 2.5 2.4 6 M5 x 0.8 KQ2N06-M5l 7 29.7 26.7 13.4 2.5 2.6 l/A: Brass, N: Brass + Electroless nickel plated M A L H Connection thread Adapter: KQ2N (Sealant) Applicable fitting size d Connection thread R Model H (Width across flats) L A* M Min. port size Applicable fitting size d Weight

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Table of Contents

x 0.8) Pilot EXH port M5 x 0.8 1 8 ( ): Rc Grommet terminal: VFS2610-E-01 02 DIN terminal: VFS2610-D Y-01 02 Lead wire O.D.

CATALOG

www.stevenengineering.com I 2.10 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-1A M5 (10-32Nom) SY3000 SY3000-39-1A M5 (10-32Nom) SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

V

www.stevenengineering.com I 2.10 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-1A M5 (10-32Nom) SY3000 SY3000-39-1A M5 (10-32Nom) SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

SQ1000/2000

To order manifold blocks with lead wire SQ1000 SQ2000 SSQ1000 FS 3 1A 03 SSQ2000 FS 3 1A 03 Lead wire type Lead wire type Without lead wire (for using spare connectors to add stations) Without lead wire (for using spare connectors to add stations) F0 F0 F kit (D-sub connector kit) Single wiring F kit (D-sub connector kit) Single wiring FS FS F kit (D-sub connector kit) Double wiring F kit

SYJ300/500/700

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/Surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D.

0.4

Side, Top C8 C3,C4,C6,M5 12 stations (24 as a semi-standard) SQ1000 D-sub Connector (25 Pins) U side D side Cable Assembly AXT100-DS25015 030 050 The D-sub connector cable assemblies can be ordered with manifolds. Refer to How to Order Manifold. 1 2 3 stations D-sub Connector Cable Assembly Terminal No. Valves are numbered from the D side.

SYJ3000/5000/7000

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5

7.5

Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for D-sub Connector SS5J3-60FD U (S, R, RS) 1 2 Stations (Pitch) P = 10 [External pilot spec.] 23.6 12.8 32.1 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 31 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A),

VZ3000

D M5 M5 x 0.8 Nil Rc Rc 1/8 VZ344(A), 2(B) port F G 20 20 stations 1(P) port M5 x 0.8 N NPT VZ35Rc 1/8 Z NPTE Applicable blanking plate assembly DXT192-13-1A Applicable individual EXH spacer assembly DXT192-21-1A Applicable individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A),

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Sysytem Figure Silencer System Solenoid valve Speed controller 4 X M5 6 X M5 6 X 1/8 6 X M5 AS1301F-M5-04 A SYJ3000 M5 X 0.8 (S = 1.8mm2) AS1301F-M5-06 B q AN120-M5 (S=5mm2) AS2301F-01-06 C 6 X M5 AS2001F-06 D w 1.2-9 Series SYJ3000 How to Order Bracket Light and surge voltage suppressor Configuration S Z R U Without light and surge suppressor With surge suppressor With light