Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

stations Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

0.4

2 18.5 T 12 12 kit EXH outlet L Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n kit 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported S R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A kit 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C kit P=17.5 63.3 44.5 7.5 One-touch fitting

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

7.5

(Regulator block mounting example) 10 Max. 19.3 (With manual operation) P port 0.5 MPa applied 0.5 MPa Regulator block Set to 0.2 MPa 0.2 MPa 5 3/ 2 2 2 2 28 21 40 4(A) 2(B) 4(A) 2(B) 1(P) 4(A) 2(B) 4(A) 2(B) 3/5(E) 1 4 4 4 4 (Pilot passage) U side (SJ3260) D side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

SYJ3000/5000/7000

M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U D B C3, N1 C4, N3 C6, N7 (R) Stations Directional Control Valves Air Grippers Modular F.

SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n-One-touch fitting 2-One-touch fitting (A,B ports) Applicable tube O.D.: 4 6 (X,PE ports) Applicable tube O.D.: 6 (L4) L3 U Side D Side Applicable connector: D-SUB Equivalent { } JIS-X-5101 MIL-C-24308 Connector case Attachment lever (both sides) (3.2) 101.2 9 3.1 Horizontal

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

L1 L2 9 A Side 2n-M5 X 0.8 (A, B port) 4-4.5 (Mounting holes) 6-Rc(PT)1/8 (P, R port) (Pitch)P=17.5 12 2.5 2.5 12.5 30 46.8 14.6 18.5 10 45.4 0.8 2-One-touch fitting (A, B port) Applicable tube C4: T0425 C6: T0604 15.2 16.5 R R P R R P 123 23.5 49 16 B A B A B A B A B A 16.516.5 77.6 77 82.8 C4: (3) C6: (3.2) 52.8 Triangle mark B Side 50 20 5.8 24.3 28.5 Polarity indication Applicable connector

Series SV

(S, R, RS) (-D) U D B C3, N1 C4, N3 C6, N7 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

VZ3000

VFN DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C6 VV5Z3 G L M D G L M D VZ34Stations 4(A), 2(B) port size VZ3502 2 stations Applicable blanking plate assembly VZ3000-69-2A 20 One-touch fitting for 4 One-touch fitting for 6 20 stations C4 SUP/EXH block mounting position C6 DIN rail length specified B D U Both sides:

SYJ300/500/700

M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5

VZ5000

2 to 15 stations 2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51

Manifold Specifications

VFN DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C6 VV5Z3 G L M D G L M D VZ34Stations 4(A), 2(B) port size VZ3502 2 stations Applicable blanking plate assembly VZ3000-69-2A 20 One-touch fitting for 4 One-touch fitting for 6 20 stations C4 SUP/EXH block mounting position C6 DIN rail length specified B D U Both sides:

VFR

, C8 (A, B port) VZS D side VFS C6, C8 Light/Surge voltage suppressor (At FZ) VS4 Plug assembly: VVFS2000-30AOption: Refer to page 3-5-8.

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

Manifold Specifications

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

port) 9 R5.5 Manual override (Non-locking) D side 21 B B B B SJ n 1 B B B A A B Common terminal A A A A 3 L1 L2 A A 2 SY 2 3 (Pitch) P = 51 71.5 1 A B SV 71.5 6 [2] n Stations R 11/2 SYJ Stations COM terminal 176.5 105.5 250 SZ D side 209 250 AMC810-14 Exhaust cleaner (Option) VP4 135 S0700 D side mounting 125 135 194 External pilot port 4 x 1/8 1/8 (PE port) VQ 125 194 U side VQ4 U side

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" U side D side L3 (L4) C6: 18.1 N7: 20.6 Manual override switch C6: 9.6 N7: 12.1 (9.1) Valve lock switch (1.8) 8 19.3 (16.3) 10 (7) 5.5 20.8 56.2 35 17.2 PE X DIN rail B A B A B A B A B A B A 9.9 Manual