IDX-OM-V020

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

2 !3 !4 !5 !6 !7 !8 !

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

ZQ

a M O DE SET1 SET2 Maximum suction flow AMJ 2 0 0 4 6 8 10 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) Misc.

IDX-OM-W095

://www.smcworld.com/ IDX-OM-W095 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 .

IDX-OM-W094

//www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5

CP95

4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !1 @4 Component Parts Description Aluminum die-casted Aluminum die-casted Aluminum alloy Stainless steel Aluminum alloy Rolled steel Rolled steel Oil impregnated sintered alloy Steel Steel for spring Carbon Steel Steel Steel Material No. !4 !5 !6 !7 !8 !

CP95

4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Large Type Vacuum Unit Series ZR

Valve + Digital vacuum switch + Filter ZR100-K1M-D1 Circuit diagram 1 2-Elliptical hole (mounting hole) 2 10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

Proposals for Energy Saving

Model VP3145 VPA3145 IN, OUT Port size Rc VP3165 VPA3165 VP3185 VPA3185 1 2 1 1/4 1 1/4 1 1/4 1 1/2 3/8 1/2 3/4 3/4 3/4 Easy conversion to N.C. or N.O.

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

LEC-OM02904

EMC (2) EMC EMC MCCB MC MCCB MC L1 1 4 (1) 1 L2 2 5 L3 3 6 E L11 L21 2 1 RAV-781BXZ-4 (2) 1 (RAV-781BYZ-2) () 1 2 3 2 2 RAV-781BXZ-4 (2) 2 (RAV-781BXZ-4) () 1 2 3 1.

1

Series CS1 Series MB, Series MB1 Series MGG Bore size (mm) Bore size (mm) Bore size (mm) Port size Port size Port size 125 32 NPT 1/2 20 NPT 1/2 140 40, 50 NPT 3/4 25 NPT 1/8 160 63, 80 NPT 3/8 32 NPT 3/4 180 100 NPT 1/2 40 200 50 NPT 1/4 250 63 NPT 1 300 NPT 3/8 80 NPT 1/2 100 Standard model no.

MXS Series Air Slide Table

GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5

JXCx-OMU0004

LED *3 ON/OFF ,, 3 L L *4 RESET STOP ON M24V7 LEF a b 45 No.JXC-OMU0004-A 9. () 9.1 .121 53 97 (1) (4) (2) No.1 NO.1 No.2 NO.2 (3) (1) (2) 1 9 7 (3) 1 2 9 7 (4) 2 1 5 3 *1 PLC I/O (2) (3) (4) (1) NO.2 NO.1 NO.1 No.1 No.2 No.1 [1] ONALARM ON OFF ON IN0 [2] ALARM ON IN03 bit_0 ON(1) IN1 ON OFF [3] BUSY ON [4] BUSY ON IN03 bit_1 IN2 ON OFF OFF IN2 [5] BUSY OFF bit_2

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

Title not found

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?