Air Slide Table Series MXJ

4 !3 !6 !8 q w !0 MXH o MXU MXS u MXQ i MXF !1 MXW @2 @1 @4 @3 !7 MXJ e t !5 @7 @6 @8 @5 With stroke adjuster MXP Axial piping type MXY MTS !2 Without stroke adjuster. With adjuster on extension end y Description No. Material Component Parts With Magnet, Rail Note Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Information

CQS 12 to 25 Can be mounted to an installed double clevis cylinder. 1 Series CQ2/CQS Double Clevis Pivot Bracket Dimensions/Part No. Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 5 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Body Size: 4, Pilot Type: Common External Pilot, Stations: 5 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Cylinder with Lock

8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double Rod 1 70 75 80 85 D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 1 90 95 100 110

C95

8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320

C95

8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

h + Stroke A L12 l + Stroke f l G Bore size [mm] Stroke range*1 [mm] A BG D E EE G KK L8 L9 L12 PL R RT SL SW VD WA WB 32 Up to 1000 22 16 12 47 G 1/8 28.9 M10 x 1.25 94 4 6 13 32.5 M6 x 1 8 10 4 4 7 40 Up to 1000 24 16 16 54 G 1/4 32.6 M12 x 1.25 105 4 6.5 14 38 M6 x 1 8 13 4 5 8.9 50 Up to 1000 32 16 20 66 G 1/4 32 M16 x 1.5 106 5 8 14 46.5 M8 x 1.25 17 4 6 5.1 63 Up to 1000 32 16 20

NCG/CG1

Bore size 40 mm (1-1/2) 50 mm (2) 63 mm (2-1/2) Stroke Hundredths of an inch* 20 25 32 40 50 63 20 mm (3/4) 25 mm (1) 32 mm (1-1/4) Stroke length must be indicated as 4 digits.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note

Rotary Actuator

4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: K (mm) L3 max X W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size W1= J K T J K T J K T J K T Size L3= L1= 10 10 6.5 to 14 4.5 to 14 0.5 to 2 0.5 to 2 Y-1 L2-1 X-3 L1-1 L4= Y= 15 15 8 to 18 5.5 to 18 0.5 to 2.5 0.5 to 2.5 Y-1.5 L2-1 X-4 L1-1 L2= 20 20 9 to 20 6 to 20 0.5 to 3 0.5 to 3 Y-1.5 L2-1 X-4.5 L1-1 X= 30 30 11.5 to 22 8.5 to 22 0.5 to 4 W2= 0.5 to 4 Y-2 L2-2

Rotary Actuator/Vane Style Series CRB1

8 1/4 1/8 1/4 Side ported Port size 1/8 1/4 1/8 1/4 Axial ported MSQ Mounting Basic style, Foot style Size: 50 Volume Size: 63 MSZ (cm 3) CRQ2X MSQX Single vane (S) Double vane (D) Rotating angle Classification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 MRQ JIS Symbol 90 30 70 88 186 48 98 136 272 180 49 94 138 281 Standard 270 66 118 188 376 100 32 73 93 197

CRBB-OM00004

head screw 1 M34L 4 Cross recessed round head screw 1 M34L 4 Cross recessed round head screw 1 M34L 3 1 M38L 3 1 M38L 3 1 M38L 2 Holding block 1 2 Holding block 1 2 Holding block 1 1 Switch block 1 1 Switch block (A) 1 1 Switch block (B) 1 No.

C95

4 i yq !3t!8!1!7w !6ui e!5 !

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Bore size [mm] Stroke range [mm] A B d11 D1 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ ZY E R L2 L9 H SL 32 Up to 500 22 30 12.2 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 4 7 26 146 190 47 32.5 15 4 48 8 40 Up to 500 24 35 14.2 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 4 5 8.9 30 163 213 54 38 17 4 54 8 50 Up to 600 32 40 19 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16