42

C6 6 One-touch fitting C8 8 One-touch fitting C10 10 One-touch fitting C12 12 One-touch fitting 02 1/4 03 3/8 B Bottom ported 1/4 CM Mixed N7 1/4" One-touch fitting N9 5/16" One-touch fitting N11 3/8" One-touch fitting Symbol Protocol type SI Unit part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

4/5 Port Air Operated Valve Series SYJA3000 1

For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2-1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 5-2-21 4 4/5 Port Air Operated Valve Series SYJA5000 How to Order A, B port size Bracket One-touch fitting for 6 C6

4/5 Port Air Operated Valve SYJA3000 Series

SS5YJA5-42-03-01 1 set SYJA5140 1 set SYJA5240 1 set SYJ5000-21-1A 1 set 4(A) (B)2 4(A) (B)2 1 (P) (R)3 1 (P) (R)3 3 position pressure center The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 4(A) (B)2 1 (P) (R)3 Caution Be sure to read this before handling the products.

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

Table of Contents

CYL port Dimensions VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Single unit Manifold VQZ VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5

Vacuum

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ1000-19AC3 C4 C6 M5 C3 C4 C6 M5 F P L VS VS7 Check valve for prevention of back pressure assembly [-B] VVQ1000-57A DIN rail mounting bracket [-D] VVQ1000-AR-1 Regulator unit VVQ1000-R-1-C6 Individual EXH spacer VVQ1000-18A Refer to p.1.10-157 for cylinder port fittings.

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

Compact Manifold Regulator

IC Fitting type One-touch fittings for regulator Fitting type One-touch fittings for regulator block ITVH Symbol Nil L1 Type Straight Elbow Symbol Nil L1 Type Straight Elbow ITVX Fitting size PVQ Fitting size Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Model Selection 1

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery