Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) Note 3) Float type auto drain Spacer Pressure switch Note 5) Note 4) Note 5) T-interface Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Note 5) 02 03 04 01 02 VHS302 03 VHS2000VHS302 03 VHS40003-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E200E400E500-06 Note 5) Piping adapter Note 5) 01

Valve Single Unit

Series Stations 02 3 SX3000 5 SX5000 2 stations 20 stations 20 7 SX7000 A/B port size Thread piping Thread type Nil Symbol Port size Applicable series Rc G F 1 8 01 02 1 4 SX3000 SX5000 SX7000 N NPT 02 1 4 NPTF T One-touch fitting (Metric size) Symbol Port size Applicable series One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting

AS

A (2) Model T D1 H1 L4 (1) Applicable tubing O.D. d (g) Mass H2 D2 L1 L2 L3 M AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 31 19 17 23.9 6 13.2 13.4 32.4 36.4 31.4 21 28.3 33.3 18.5 8 25.3 15.2 10

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

Speed Controller with One-touch Fitting

Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 555 A AS Series Needle Valve/Flow Rate Characteristics AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 600 300 Inlet pressure

Vacuum Pad

42 42 52 52 52 151 186 222 151 186 222 65 65 65 82 82 82 41 41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125

Vacuum Pad

42 42 52 52 52 151 186 222 151 186 222 65 65 65 82 82 82 41 41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125

Vacuum Pad

42 42 52 52 52 151 186 222 151 186 222 65 65 65 82 82 82 41 41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125

Vacuum Pad

42 42 52 52 52 151 186 222 151 186 222 65 65 65 82 82 82 41 41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

Series KG Stainless Steel One-touch Fittings

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

0.4

F None Nil DIN rail mounting (For manifold) IN side port size OUT side port size Manifold Optional Parts D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting F With bracket N Name plate Note) When two or

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

AC

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

KG

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5