42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

Plug-in Unit

mA), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Compact Manifold Regulator

IC Fitting type One-touch fittings for regulator Fitting type One-touch fittings for regulator block ITVH Symbol Nil L1 Type Straight Elbow Symbol Nil L1 Type Straight Elbow ITVX Fitting size PVQ Fitting size Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction

VKF300

42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side as port A S Type S42 (solenoid on same side as port

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side as port A S Type S42 (solenoid on same side as port

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

Compact 5-Port Solenoid Valve

6.5 mm, and 9 mm for C6.

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations Cylinder ports 1 station 01 Port size Symbol 16 stations (1) 16 C3 C4 C6 M5 CM One-touch fitting for 3.2 Note1) Refer to p.1.10-198 for details.

VQ7-6/7-8

) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 34 25 21.2 18 1.5 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 12 CRBU2WU20-D 0.004 0.012 0 0.043 42 34.5 25 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 50 47.5 29 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69

Table of Contents

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A