F 1/4 KQY23-02S 14 9.6 10 17.5 25.5 37 15.5 3.4 2.9 20 4 M5x0.8 KQY04-M5 8 10.4 8 18 15.5 29.5 16 4.6 4.6 6 4 1/8 KQY04-01S 10 10.4 10 18 22 36 16 6.4 6.4 13 4 1/4 KQY04-02S 14 10.4 10 18 26 38 16 6.4 6.4 19 6 M5x0.8 KQY06-M5 8 12.8 8 20 16 32 17 4.6 4.6 8 6 1/8 KQY06-01S 10 12.8 10 20 23 39 17 13.4 13.4 13 6 1/4 KQY06-02S 14 12.8 10 20 27 41 17 13.4 13.4 21 6 3/8 KQY06-03S 17 12.8 10 20 29
A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4
*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.
(mm) <M5> Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 12.8 17 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51
20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500
M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10 One Touch Fittings for 10 (SY7000 Only) Imperial (Inch) M5T 10~32Nom (SY3000 Type41 Only) 01T 1/8NPTF (SY5000 Type 41 & SY3000 Type 42
-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 5 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 14 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 3 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 4 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 11 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 8 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 2 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 5 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 6 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 14 Stations, Port Size: M5 (M5X0.8)