3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Refer to p.2.10-37 for DIN rail model number C Connector Stations Port size{2(A)Port} 2 stations 02 VQZ200 VQZ300 Port size Symbol 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 Rc(PT)1/8 Rc(PT)1/4 Mixture port C4 C6 C8 C10 01 02 CM(1) Note 1) Specify port mixture/with port plug by means of manifold specification sheet.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

4/5 Port Air Operated Valve SYJA3000 Series

45 0.39 0.18 0.69 0.39 0.12 0.44 2 position Body ported A, B port: C4 (One-touch fitting for 4) P, R port: M5 x 0.8 0.40 0.19 0.69 0.40 0.12 0.43 Closed center M5 x 0.8 SYJA520-C4 Exhaust center Pressure center Single Double 0.40 0.15 0.56 0.37 [0.37] 0.10 [0.11] 0.41 [0.41] 0.40 [0.37] 0.15 [0.10] 0.57 [0.41] 0.37 0.10 0.41 55 3 position 41 45 0.36 0.19 0.70 0.40 0.12 0.47 2 position A,

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket) and horizontal connector entry [-JS].

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

SYA3000/5000/7000

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 SYA Pilot pressure MPa SYJA Specify the part numbers for valves and options together beneath the manifold base part number. VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa (Refer to Best Pneumatics No. 1-1.) Specify the part numbers for valves and options together beneath the manifold base part number. SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.