LEC-OM069xx

2 10.1 List of Parameters1.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.2 Parameter Recording Table.10-34 1.

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

AC

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

V100

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

5 Port Air Operated Valve Series VFA3000 1

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

LEC-OM07605CN

) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10

VFA3000

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

-fl Seies

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)