This is a legacy product, and replaced byVV5FS2-10-021-01T

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

5 Port Air Operated Valve

How to Order Manifold Assembly Example (VV5FA3-30) Closed center VFA3330-02 (1 set) Double solenoid VFA3230-02 (1 set) Single solenoid VFA3130-02 (3 sets) Manifold base (5 stations) D side U side VV5FA3-30-051 Stations 1 3 2 VV5FA3-30-0511 set (Type 30, 5-station manifold base part no.) VFA3130-023 sets (Single part no.) VFA3230-021 set (Double part no.)

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

LEC-OM071xx

A.021: Parameter Format Error 1 (The parameter data in the DRIVER is incorrect.) A DRIVER fault occurred. The DRIVER may be faulty. Replace the DRIVER. The power supply voltage suddenly dropped. Measure the power supply voltage. The DRIVER may be faulty. Replace the DRIVER. A.022: System Checksum Error 1 (The parameter data in the DRIVER is incorrect.)

CATALOG

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

V

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional area 0.23mm2 45 27 Series VQZ Base Mounted Type Dimensions: VQZ200 Dimenisons: VQZ200 (mm) Valve Scale: 45% Grpmmet (G): VQZ2 5(R)G 01T 02T 2 4.5 Mounting holes 4 32 19.2 Manual override Cover diameter 1.4

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Tamper Proof and Flat Head Screw

ASD430F-02-08ST R 1/4 36.7 11 7 15 18.5 18.5 17 46.5 15.2 8 28.2 1.5 40.7 41.7 ASD430F-02-10ST 19.7 21 49.3 18.5 10 31 ASD530F-02-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-02-08ST 18.5 15.2 51.3 8 28.2 R 1/4 49.3 15.4 9.5 23 19.8 19 55.3 1.5 53.7 ASD530F-02-10ST 21 18.5 54.1 10 32.6 23.1 ASD530F-02-12ST 22 20.9 55.9 12 34.4 ASD530F-03-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-03-08ST 18.5 15.2 51.3

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-06ST ASD430F-02-08ST ASD430F-02-10ST ASD530F-02-06ST ASD530F-02-08ST ASD530F-02-10ST ASD530F-02-12ST ASD530F-03-06ST ASD530F-03-08ST ASD530F-03-10ST ASD530F-03-12ST ASD630F-04-10ST ASD630F-04-12ST 12.9 13.7 13.7 18.5 17 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3 48.3 51.3

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: C10 (ø10 One-touch Fitting)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: ø10 One-touch Fitting, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -

Vacuum Ejector Series ZM

Blue DC (-) Diaphragm Switch (ZSM) Solid State Switch: ZSM1-015 Reed Switch: ZSM1-021 Contact protection box The switch does not have a built-in contact protection circuit. Use this box if an induction load is applied or if the lead wire is longer than 5 meters.