Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 9 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 11 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 4 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 7 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 6 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 9 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 11 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 7 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

LEH_C

LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

LEY-OM007

50 60 [mm] bCW 50mm 0 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 10 50mm CCW CW -40 -30 -20 -10 0 10 [mm] -10 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -33- LEC []/ LEC 12: CCW 1: CW 2: CCW 1 LEY*16**:100LEY*25**:100LEY*32**:100 LEY*16*A*150LEY*25*A*200 100 20 550 / LEY16* 535 / LEY25* 530 / LEY32* 1000 () 10 0 CCW CW / P.37 6.1 1 CCW CW 2 3 OFF ON -34- 5. / A

IDX-OM-W038

10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2. IDX-OM-W038 . (17) (17) mm IDH6IDHA6 ( ( 1.25 6.5 Rc1/2 N.C N.O M3 (N.C:) (N.O:) 2 6.5 :1.25m m :M3 Rc1/2 31 15 (N.O) (N O 10 2 244 35 184 392 17 2 1 80 223 321 300 1 485 70 372 568 ( 10) ( 10) 240 2 15 1 306 270 63 IDH Series IDX-OM-W038 . 6.3 6.2.