Passage: 21 (Top Ported Common EXH), Stations: 2 Stations Top Ported/Valve

Passage: Top Ported Common EXH, Stations: 2 Stations Top Ported/Valve, Port Size: -, Thread: -

Vacuum Ejector Series ZM

Air consumption 120 60 60 100 50 50 80 40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021

5 Port Air Operated Valve

20 stations P, R Port size 1/8 1/4 3/8 1/2 VFA1000 VFA3000 VFA5000 Symbol Up to 10 stations for VV5FA5-20, and up to 15 stations for VV5FA5-21. 30 20 21 The A and B ports are made on the top.

LEC-OM071xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time

LEC-OM069xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time Constant

Passage: 21 (Top Ported Common EXH), Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: 00N (NPT)

Passage: 21 (Top Ported Common EXH), Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: 00T (NPTF)

Passage: 21 (Top Ported Common EXH), Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: 00F (G)

Passage: Top Ported Common EXH, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: NPT

Passage: Top Ported Common EXH, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Passage: Top Ported Common EXH, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: G

V100

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-III type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.