Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude
Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)
Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5
ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.
ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.
Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03
02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.
Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.
VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360
(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220
1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41
) 40 40 24.5 14.7 1.55 (1.2) (14) L (Lead wire length) 167.8 1/4" {P(1) port} 2 x 1/8" {EA(5), EB(3) port} (83.9) 0.9 18 2 EB P EA (23.9) 36 2 x 2.2 (For manifold gasket positioning) (66) L-type plug connector with cover (LL) 53-SY7220-LL-02 (-F2) L (Lead wire length) 157.6 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 (78.8) Terminal type (TT) 53-SY7220-TT-02 (-F2) Max.
In common EB P EA SY7 40 Type 43 Stacking type Individual wiring SY9 40 + + + + P. 89 Manifold stations can be increased. Type 43P Stacking type Flat ribbon cable SY9 40 P. 103 Manifold stations can be increased. In common Type 45 Stacking type/DIN rail mounted Individual wiring SY3 40 SY5 40 + + + + + P. 115 Stations can be increased on the DIN rail.
28.4 6 14 1/4 KQ2Y10-02lS 17 15.9 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03lS 17 15.9 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04lS 22 15.9 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 H 10 Connection thread (With sealant) 12 1/4 KQ2Y12-02lS 17 18.5 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03lS 17 18.5 17 23 30.8 23 48.8 17 57.4 45.4 9 28.2 1/2 KQ2Y12
21 MM M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NA 24 30 34.5 42.5 G 8 8 8 11 B1 13 17 17 22 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 41 45 45 50 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 8 10 12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e
20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C
0 0.033 0 0.039 Boss-cut Style (mm) (mm) ZZ 103 107 109 138 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 D-X 1195 Series CM2Y Head Side Trunnion Style (T) CM2YT Bore size Stroke Effective thread length 2 x FL 0.025 0.061 TDe9 Width across flats B2 G 2 x P (Rc,
, 46 Pad diameter For use where there is no space for the buffer (spring type) How to Order Pad unit ZP2 02 ZJ N Work pieces with inclined adsorption surface Pad material Pad diameter Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Pad diameter 2 4 5 6 40 46 N S U F GN GS 02 04 05 06 40 46 Pad type Type Bellows Symbol ZJ Dimensions:
, 46 Pad diameter For use where there is no space for the buffer (spring type) How to Order Pad unit ZP2 02 ZJ N Work pieces with inclined adsorption surface Pad material Pad diameter Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Pad diameter 2 4 5 6 40 46 N S U F GN GS 02 04 05 06 40 46 Pad type Type Bellows Symbol ZJ Dimensions: