Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

Dual Rod Cylinder Series CXSJ/CXS

152 162 70 50 40 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 568 Series CXS Dual Rod Cylinder Basic Type Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45 50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting

Table of Contents

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162 152 182 192 222 142 172 162 192 232 262 70 90 50 Dimensions other than those listed above are the same as

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

CXWM/CXWL

100 52 164 30 63 35 238 202 125 77 214 60 88 32.5 288 252 150 102 264 75 113 37.5 338 302 175 127 314 90 138 42.5 388 352 200 152 364 90 163 55 Note) For 25 stroke, the shock absorber is mounted on a plate.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Base Mounted Type SY3000/5000/7000/9000 < >: Values with surge voltage suppressor 3 position closed centre/exhaust centre/pressure centre Grommet (G), (H): SY7 40(R)-Q 02 03 3 4 5 Scale: 35% G H SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ L type plug connector (L): SY7 40(R)-L-Q M type plug connector (M): SY7 40(R)-M-Q DIN terminal (D): SY7 40(R)-D-Q 02 03 3 4 5 3 4 5 02 03 02 03 3 4 5 VQ4

VZ3000

Red Red 3-3-43 Series VZ3000 Type 40 Manifold: Bottom Ported VV5Z3-40Station 2-M5 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Manual override (Non-locking) G: 300 mm H: 600 mm M5 x 0.8 (PE port) (Lead wire length) (4(A), 2(B) port) (Pitch) (mm) Stations 2 3 58 40 74 56 20 316 328 L1 L2 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184

Manifold Specifications

Red Red 3-3-43 Series VZ3000 Type 40 Manifold: Bottom Ported VV5Z3-40Station 2-M5 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Manual override (Non-locking) G: 300 mm H: 600 mm M5 x 0.8 (PE port) (Lead wire length) (4(A), 2(B) port) (Pitch) (mm) Stations 2 3 58 40 74 56 20 316 328 L1 L2 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184

Air Cylinder

Rod flange: CBG1Fl Head flange: CBG1Gl ZZ + Stroke (mm) Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ (Head flange) Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot 20 124 144 + l 123 143 + l 135 155 + l 25 130 152 + l 129 151 + l 141 163 + l 32 130 152 + l 130 152 + l 140 162 + l 40 152 172 + l 147 (156) 167 (176) + l 161 181 + l

CM2

) LZ LY LV LT LP LH Q LG P LF N1 WB G LD WA 20 20 20 152 59 18.4 3.2 37 30 30 6 15 8 6.8 8.5 13 17.5 21.5 25 25 25 156 59 18.4 3.2 37 30 30 6 15 8 6.8 13 17.5 10.5 24.5 32 32 32 174 75 28 4 50 40 40 6 15 8 9 13 17.5 11.5 27 40 40 40 203 75 28 4 50 40 40 8 15 11 9 16 21.5 15 32.5 6-4-20 21 Series CM2 Accessory Bracket Dimensions Single Knuckle Joint Single Knuckle Joint I-020B/032B Material

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

Process Pump

(with LQ1 fittings): PAF3410S-X68 1S13 1S19 152 2 x M5 x 0.8 Thread depth 9 139 (40) 11 133 114 95 19 63 121 4 x 7 Reset button Bottom view of body Foot (Option) With nut (with LQ3 fittings) PAF3410-S-3S13--X68 16 FLUID OUT With nut Air operated reset port Rc, NPT, G 1/8" (102) AIR SUP Rc, NPT, G 1/4" 119 106 14 13 97 77 43 Silencer: AN20-02 (Option) Foot (Option) FLUID IN With nut AIR EXH

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 L3 L4 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 20 Stations 341 328 304 296 2 Stations 53 40 16 8 680 Manifold specifications

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 58 40 Station 20 346 328 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 Station L1 L2 331 5 Port Solenoid Valve 10-SYJ5000 [ ]: AC Type 40: Bottom Ported/10-SS5YJ5-40Stations -M5 Grommet (G) Directional Control Valves Air Grippers Modular F. R.

Metal Seal/Rubber Seal Series VQ Body Ported

Dimensions Formula L1 = 16n + 29, L2 = 16n + 40 n: Station (Maximum 16 stations) n L 1 2 77 88 150 160.5 3 93 104 175 185.5 4 109 120 187.5 198 5 125 136 200 210.5 6 141 152 225 235.5 7 157 168 237.5 248 8 173 184 250 260.5 9 189 200 262.5 273 10 205 216 287.5 298 11 221 232 300 310.5 12 237 248 312.5 323 13 253 264 337.5 348 14 269 280 350 360.5 15 285 296 362.5 373 16 L1 L2 L3 L4 45 56

Made to Order

25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper