5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

WFS4000WFS4000R-04T-l R-04T-2 20A-l 20A-2 Body type Plug-in type Non Plug-in type Part No. WFS4000-10A ) SUP gallery block disc When supplying manifold with more than one pressure. insert block disc in between stations subjected to different pressures. Body type Plug-in type Non plug-in type Part No.

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0001

2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5** B2401-P6** B2401-P8** 63 80 AS568-043V AS568-045V AS568-043

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XL-OMV0005

AS568-025 AS568-030 AS568-035 AS568-039 Nut assembly (9) SUS304 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XLA Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V Exterior seal (3) Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional seal material symbol after the model number, except for the standard sealant material

XLA- ∗ -F7NJ ∗ - ∗ Series

Material Valve seal (2) Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve size 63 80 100 160 Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-043V AS568-045V AS568-050V AS568-167V Exterior seal (3) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Note1) List the optional sealant

XL-OMV0002

XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XL-OMY0002

.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227 ** S XLD40-2-9-1A XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XLDV Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal 3 Specific AS568-043** AS568-045** AS568-050** AS568-167** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal 2 Specific AS568-233** B2401-V85** AS568-349** B2401-G155** Standard XLD80-2-9-3A XLD80-2-9-3A XLD100-2-9-3A XLD160-2-9-1A S valve seal assembly 4 Specific Note1) List the optional

XMC/XYC Series

Material 63 80 Standard AS568-043V AS568-045V External seal 3 Specific AS568-043 ** AS568-045 ** Standard AS568-233V B2401-V85V Valve seal 2 Specific AS568-233 ** B2401-V85 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound no. 1349-80). Note2) Refer to the Construction on the page 8 for the construction numbers.

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

XLF Series

Material Valve size 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal (3) Special AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Special AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional sealant material symbol after the model number, except for the standard

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

Material 63 80 100 160 Exterior seal (3) Standard AS568-043V AS568-045V AS568-050V AS568-167V Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S Valve seal Standard XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Specific XLD63-2-9-1A ** XLD80

XLG Series

Material Valve size 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal (3) Special AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Special AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional sealant material symbol after the model number, except for the standard

XMA/XYA Series

Material 63 80 External seal 3 Standard AS568-043V AS568-045V Specific AS568-043 ** AS568-045 ** Valve seal 2 Standard AS568-233V B2401-V85V Specific AS568-233 ** B2401-V85 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound no. 1349-80). Note2) Refer to the Construction on the page 9 for the construction numbers.

Title not found

5.12 l130) 2.99 (76) 6.30 tr60) 2.80 l71l 4.07 (205) 2.56 (65) 0.49 12 s) 3.15 (80) 8.43 (214) 1.57 (40) 4.69 (1r9) a.o2 (1021 3.O7 (78) 0 9 4 (25) 2.05 (52t 0.55 (14) 0.83 l21l M10r1.75 0 4 3 ( 1 1 ) M22r1.5 i.46 (37) 0 16) 4.O2 (102) 0.53 13.5) o.71 0 8 ) E 7.09 1180) 2.83 172) 8.50 (216) 2 5 6 (65) 0 5 5 1 4 0 1 3 1 9 (81) 8.86 (2251 1 . 1 8 (30) 2.05 \521 0.55 (14) 0.83 l21l M12x1.75 043

Air Pilot Operated

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!