Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 20 340 331 2 52 43 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1.2-47 Series SYJ5000 42 Type Manifold: Side Ported/SS5YJ5-42Station -01,C6 Grommet (G), (H) C6 (Built-in One-touch fitting) Manual override Depress and turn to operate and lock override

Table of Contents

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

(mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting groove 6-M5 x 0.8 thread depth 9 90 203

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Table of Contents

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

Table of Contents

ON OFF Time 16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Handling Warning Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N when being inserted 8 mm.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

VK300

1/8 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF CE-compliant F With bracket (Not mounted) F N T 01 Rc 1 8 20 20 stations Q CE-compliant Nil A port: Rc 1/8 Note) Applicable only for DIN terminal type Type 42: Base mounted (A port side ported) Applicable solenoid valve VK334-(-Q) How to Order VV3K3 05 01 42 Applicable blanking plate assembly VK300-42-1A Thread type

VK300

-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric

3 Port Solenoid Valve Series VQ100 1

225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side

VKF300

20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side

MXS

GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42

SMC

Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100