CL

168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131

10

89 30 55 20 19 72 16 M10 x 1.5 10 26 16 5 M26 x 1.5 38 1/2 114 40 124 124 17 15 258 125 54 50 136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2.0 38 1/2 120 50 148 148 17 15 314 With Rod Boot [mm] Bore size [mm] d e f l h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod

Table of Contents

(mm) Model Connection thread M5 x 0.8 L1 KQ2ZF04-M5 9.8 19.5 21 11 15.5 15.5 22 17 22 22 20 29.5 29.5 16.5 25.5 25.5 35 27 35 35 39 39 42 M5 x 0.8 8 21 21 47 32 49 54 8 4 10.4 16 10.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 KQ2ZF04-01S 13.4 14 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 KQ2ZF06-02S 41 20.6 25.5 19 D1 L3 L2 KQ2ZF08-01S 31 41 41 17 20.6 27 17.6 25.5 8 15.2 18.5 15.2 KQ2ZF08-02S 19

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 8 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 9 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 14 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 16 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 7 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 15 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)