5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

voltage suppressor (External pilot port) Electrical entry Pilot EXH port ( ): Rc 1 8 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 Manual override (Non-locking) 2 x 5 mounting hole 150.5 (3 position: 158) 2 x 5 mounting hole Manual

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

V

Exhaust) 1 Plug in unit T Y P E O F M A N I F O L D N U M B E R O F S TAT I O N S 01 1 Station 16 16 Stations N o t e 1 ) When more than one option is desired Combined symbols in alphabetical order.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Including JOG operation after return to origin) The stroke is outside the stroke limit. (01-052) Make sure that the basic parameter, "Stroke (+)" and "Stroke (-)" are consistent with the distance of the electric actuator movement specified in the step data. limit B RESET Stroke input Caution If the operation method of step data is INC, take care with the position where operation

JXCx-OMY0004

Set stroke is outside the stroke limit. (01-052) Stroke limit B RESET Caution If the operation method of step data is "relative coordinated movement", note the location where the operation starts and the distance traveled. If the location is out of the stroke range when the power is supplied, this alarm is generated. Move the table within stroke range, and supply power. -66No.

High performance type Step Motor Controller (Servo/24 VDC)

(Including JOG operation after return to origin) The stroke is outside the stroke limit. (01-052) Make sure that the basic parameter, "Stroke (+)" and "Stroke (-)" are consistent with the distance of the electric actuator movement specified in the step data. limit B RESET Stroke input Caution If the operation method of step data is INC, take care with the position where operation

JXCx-OMY0008

Alarm_Co mment_1 11 (01-111) 6F C RESET Input The motor speed exceeds a specific level due to an external force, etc. Speed exceeded set value (01-144) Make improvements so that the motor speed will not exceed the maximum speed of the actuator.

JXCx-OMY0006

Alarm_Co mment_1 11 (01-111) 6F C RESET Input The motor speed exceeds a specific level due to an external force, etc. Speed exceeded set value (01-144) Make improvements so that the motor speed will not exceed the maximum speed of the actuator.

VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

Electric Actuator / Low profile slider type

Items don't need to be changed in positioning operation. a < Movement MOD> When the absolute position is required, set Absolute Position Accel Decel Pushing F TriggLV Moving F Area 1 Area 2 In posn No.

Electric Actuator / Guide rod Slider

Items don't need to be changed in positioning operation. a < Movement Method> When the absolute position is required, set Absolute Position Accel Decel Pushing F TriggLV Moving F Area 1 Area 2 In pos No.

Table of Contents

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

-fl Seies

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

AS

-23 AS221F-01-01 16 3.2 9.3 20.4 16 27.5 20.4 9.3 1/8" 27.5 12.7 12.7 AS221F-01-04 AS221F-01-03 17 4 20.4 27.5 9.3 5/32" 9.3 27.5 20.4 17 14.2 13.4 13.4 12 AS221F-01-06 AS221F-01-05 6 17 1/8 11.6 23.1 30.2 35.2 30.2 32.1 27.1 1/8 11.4 16.5 12 3/16" 13.5 27.1 14.2 32.1 27.5 20.4 30.2 35.2 (12.7) (12.7) AS221F-01-08 AS221F-01-07 19 19 8 13.2 31 23.9 18.5 15.2 18.5 1/4" 32.4 25.3 AS221F-01-