LEC-OM02904 PD16 *MD1 1 0h TM C1MR Configurator2 No.PD1500010038() 0 0 00 38 00 38 PD17 *MD2 2 0h TM C1MR Configurator2 No.PD150001003A() 0 0 00 3A 00 3A PD18 0h PD19 0h PD20 *SLA1 No.1 0 016 TM C1MR Configurator2 No.PD1500103.13 PD21 0 PD22 0 PD23 0 PD24 0h PD25 0h PD26 0h PD27 0h PD28 0h PD29 0h 5 31 5 No.
When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.1 0.1 0 0 0 0 1000 2000 3000 4000 5000 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25 Rc 3/8 AR50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500
D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.
VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.
With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)
-A (PA) ARBQ5000-00-B (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500
) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size
-A (PA) ARBQ5000-00-B (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500
0 0 0 / 2 0 0 0 / 3 0 0 0 P O R T P L U G S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 E X H P O R T S I L E N C E R PORT PLUG VVQZ100-CP (FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T H E R M A N
O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4
-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5
) Manual override 0.3 + B A 0.2 Interface 0.1 0 50 100 150 200 0 Pilot valve (SY114) Adapter plate Flow rate l/min (ANR) ARBYJ7000-00-P Interface Regulator 0.6 Caution 0.5 Outlet pressure (MPa) Spacer type regulating valve on manifold block can regulate the pressure to the valve individually. 0.4 0.3 Specifications 0.2 Interface regulator ARBYJ7000 ARBYJ5000 0.1 Applicable solenoid valve
A CE 000 Q CE 100 IP8*00-0*0 Rc1/4 G1/2 IP8*00-0*1 M Rc1/4 M201.5 IP8*00-0* 0 N Rc1/4 1/2NPT IP8*00-0* 1 02MPa IP8*00-0*0 1 1/4NPT G1/2 IP8*00-0*1 2 03MPa 2 1/4NPT M201.5 IP8*00-0* 3 1.0MPa 3 1/4NPT 1/2NPT IP8*00-0* IP8*00-0*0 4 G14 G1/2 1 IP8*00-0*1 0 5 G14 M201.5 IP8*00-0* 6 G14 1/2NPT IP8*00-0* 1 (ExdBT5) 2 IP8000(1085mm) A 0.7mm IP8000IP8100 B 1.0mm 3 C M IP8100 D S E 35100mm
0 u !0 !2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !
BIN. _ _ _ x _ _ _ x FLS() 0 1 0h _ _ x _ RLS() 0 1 _ x _ _ x _ _ _ _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h 16 0 0 0 BIN HEX FLS() 0 0 RLS () 0 0 0 BIN 0: BIN 1: ON 5 39 5. [] PD07 *DO1 1 CN3-13 _ _ x x 5.8 05h _ x _ _ 0h x _ _ _ 0h 5.8 00 02 RD() 03 ALM() 04 INP() 05 MBR() 06 DB() 07 TLC() 08 WNG() 09 BWNG() 0A SA() 0C ZSP() 0F CDPS() 11 ABSV() 17 MTTR(Tough Drive) PD08 *DO2 2 CN3-9INP
HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!
(inch) Weight (g) Note) D L M Model 2-Applicable tubing KQ2H01-00 KQ2H03-00 KQ2H05-00 KQ2H07-00 KQ2H09-00 KQ2H11-00 KQ2H13-00 1 8 5 32 3 16 1 4 9.6 10.4 11.4 13.2 15.2 17.9 21.7 31.5 32.5 34 34.5 38.5 42.5 44.5 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 3 3 4 4 6 11 16 5 16 3 8 1 2 Note) D: Max. diameter Different Diameter Straight: KQ2H Min. port size Applicable tubing O.D.
0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.
ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12