Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 2 Stations, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

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Air cylinder

Consumable parts 3-3-1 Replacement parts 20 25 32 40 Seal kit number CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS Grease pack (Accessory) GR-S-010(10g) Rod seal Piston seal Contents of the Tube gasket seal kit Grease pack (10g) 1pc. of each 20 25 32 40 Wear ring CM-020-07-301B CM-025-07-302B CM-032-07-304B C1A040-07-305B Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n

HRX-OM-X010

Voltage V Be sure that no ground connection is made to a water pipe, gas pipe and lighting rod. dV dt = Voltage ratio Voltage rise % on zero-cross point dV t Time dt Power cable The power cables are to be prepared under your responsibility, referring to the following table.

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry CE-compliant

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 6 (12 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 12 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 24 VDC, Electrical Entry: -, Blanking Plate: -, CE-compliant: -

5 Port Solenoid Valve Series SV1000/2000/3000/4000

QT -RRD-5M

0.55

suppressor is used, there is some 100 V 200 V 110 V 220 V residual voltage to the protection element and rated voltage.

HRX-OM-I051

An excessive amount of the circulating fluid is observed in the tank. 07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. 08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature.

HRX-OM-K003

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

VKF300

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 Rated voltage 100VAC 200VAC 240VAC 6VDC 12VDC 24VDC 48VDC Rating symbol A1 A2 A3 LW06 LW2 LD4 LD8 DIN terminal Circuit diagram for connector with light The bushing may be damaged if the tightening torque of 0.8Nm is exceeded.

2

Note 7) Mounting position: AF+T+AR V V V V V + Attachment Nt Nil Without attachment V V V V V V Mounting position: AF+AR+V V V V V V1 Note 8) Mounting position: V+AF+AR V V V V + d Pressure relief 3 port valve e Set pressure Note 9) Nil 0.05 to 0.7 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V 8

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Vacuum Unit

V V V V p. 9 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function Single unit V V V p. 10 Without valve V V p. 13 Pressure switch for vacuum V Ejector System V V V With valve V V p. 11 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function For Manifold V V V p. 12 Without valve

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.