4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

terminal: VF5120-DVF5120-Y02 03 02 03 Manual override (Non-locking) Manual override (Non-locking) (Mounting hole for manifold) (Mounting hole for manifold) Applicable cable O.D.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F-03-06 AS321F-03-07 6 1/4" 12.8 17 27.8 39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2

Modular Type Air Filters Series AF

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

AIR COMBINATION

Note5) Note6) Y110-M5-A Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A Y610-03-A Y610-(03)-A VHS40-02A VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

KR

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

SX

AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 How to Use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

AIR COMBINATION

-02-A Y410-03-A Y510-03-A VHS40-02A VHS40-03A VHS20-01A VHS30-02A Pressure relief 3 port valve Note5) VHS40-06A Attachment VHS20-02A VHS30-03A VHS40-04A E300-04-A E300-03-A E300-02-A E400-02-A E200-01-A E400-04-A E400-03-A Piping adapter Note5) E100-M5-A E200-02-A E500-06-A E200-03-A E400-06-A IS10E-4002-A IS10E-3002-A IS10E-2001-A IS10E-4003-A Pressure switch with Note5) IS10E-2002-A IS10E

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

5 Port Solenoid Valve Series SV1000/2000/3000/4000

assembly For A, B port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type SJ Nil F N T Rc G NPT NPTF SY SV P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause air leakage.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification

Air Combination

AC20C-D to AC40C-D 30 03 DE AC C D Symbol Description Body size 20 30 40 Rc Nil Thread type NPT N G F 1/8 1/4 3/8 Port size 01 02 03 3/4 1/2 04 06 Nil Without auto drain a Float type auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O. (Normally opened) Drain port is opened when pressure is not supplied.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

AW

AW10 AW20(K) AW30(K) AW40(K) AW60(K) AR40(K)-06 No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 (14.5) L Without light SY100-82-1 With light How to Order Enter the part number for a plug connector solenoid valve without connector together with the part number for a connector assembly with cover.

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VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 Non-leak/ Medium vacuum 106 Pam3/sec or less Note) 1/8 (6A) Air 300 NBR, FKM 1 cm3/min or less Note) Value for V and M options (Non-leak/Medium vacuum) 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3 0.46