PFM7

V Panel mount adapter (For with flow adjustment valve) PFM ZS-33-JS PFMV Panel mount adapter A PF2A Panel mount adapter B Made to Order PF2W Specification/Description Symbol X693 X694 PF2D Change of piping entry direction combination Panel IF Compatible with argon (Ar) and carbon dioxide (CO2) mixed gas X731 Mounting bracket For details, refer to page 940 through to 942.

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 33 (Push Button, Flush), Suffix: None, Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: U (w/Bottom Mounting Thread), Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 33 (Push Button, Flush), Suffix: None, Indicator: None

Pipe Port Type: G, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 2.03, Suffix for indicator

Number of Ports: 3 Port, Piping Direct., Plunger Length: Side Ported, Long, Body Option: w/Bottom Mounting Thread, Port Size: G 1/8, Side Ported Only, Actuator Type: Push Button, Flush, Suffix: None, Indicator: None, Bracket: -

CATALOG

L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

V

Indicate B in model no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 107.5 100 74 [81] M8

Stainless Steel 316 Fittings

D Applicable tube b Bulkhead Connector: KQG2E Applicable tube O.D.

S

U T T O N C O L O R R Red G Green B Black S Steel K E Y T O DIMENSIONAL T A B L E S S A F E T Y F.O.F.

Ozone Resistant

with reverse flow check valve AR ASD AR Pressure regulator with internal pilot ASP Direct operated precision regulator ARP ARJ Miniature regulator ZM ZZM Vacuum ejector Vacuum products MR Unit AMR 9 List of Ozone Resistant Non-HNBR type Products 2: Series 80Description Series Note 80-VF3000 80-VF5000 80-VK3000 80-VP300 80-VP500 80-VP700 80-VJ100 80-VT307 80-VT317 80-VK300 80-VKF300 80-VM130

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: B (Black), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 00 (Basic), Suffix: None, Indicator: None