Number of Ports: 3 Port, Piping Direct., Plunger Length: Side Ported, Long, Body Option: Side Mounting, Port Size: G 1/8, Side Ported Only, Actuator Type: Push Button, Flush, Suffix: None, Indicator: None, Bracket: w/Bracket

Number of Ports: 3 Port, Piping Direct., Plunger Length: Side Ported, Long, Body Option: Side Mounting, Port Size: G 1/8, Side Ported Only, Actuator Type: Twist Selector, 2 Position, Suffix: Black, Indicator: None, Bracket: w/Bracket

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Description Material Note O-ring O-ring NBR NBR Body B Brass Electroless nickel plated Body B Brass Electroless nickel plated O-ring O-ring NBR NBR POM (2) Needle Brass Electroless nickel plated Seat ring Brass Electroless nickel plated Spring Steel wire U seal HNBR U seal HNBR Cassette POM, Stainless steel (1) Gasket Spacer NBR, Stainless steel Tool steel Retaining ring for hole type C Note

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !7 Seat ring Gasket Electroless nickel plated Brass NBR, Stainless steel y !8 Spring Retaining ring for hole type C Steel wire Tool steel u !

VMx-OMP0001

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

PFM7

V Panel mount adapter (For with flow adjustment valve) PFM ZS-33-JS PFMV Panel mount adapter A PF2A Panel mount adapter B Made to Order PF2W Specification/Description Symbol X693 X694 PF2D Change of piping entry direction combination Panel IF Compatible with argon (Ar) and carbon dioxide (CO2) mixed gas X731 Mounting bracket For details, refer to page 940 through to 942.

Ozone Resistant

with reverse flow check valve AR ASD AR Pressure regulator with internal pilot ASP Direct operated precision regulator ARP ARJ Miniature regulator ZM ZZM Vacuum ejector Vacuum products MR Unit AMR 9 List of Ozone Resistant Non-HNBR type Products 2: Series 80Description Series Note 80-VF3000 80-VF5000 80-VK3000 80-VP300 80-VP500 80-VP700 80-VJ100 80-VT307 80-VT317 80-VK300 80-VKF300 80-VM130

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: B (Black), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 00 (Basic), Suffix: None, Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 30 (Push Botton, Mushroom), Suffix: G (Green), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 08 (Toggle Lever), Suffix: None, Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 06 (Roller Plunger), Suffix: S (Hard Steel Roller), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 33 (Push Button, Flush), Suffix: None, Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 30 (Push Botton, Mushroom), Suffix: R (Red), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 30 (Push Botton, Mushroom), Suffix: B (Black), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: R (Red), Indicator: None