Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Magnetically Coupled Rodless Cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

AS-FG/ASD-FG

40 16.2 23 34.4 56.2 50 22 AS331FG-02-12 AS331FG-N02-07 25.6 44.9 38.7 1/4" 12 20.9 13.2 69 60 17 20.6 12.9 NPT 1/4 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 AS331FG-03-06 AS331FG-N02-09 28.2 38.5 39.7 5/16" 6 12.8 15.2 56 23 63 18.5 19 12.9 20.6 28.2 49.1 56.2 18.5 AS331FG-03-08 AS331FG-N02-11 32.6 39.7 43.7 3/8" 8 15.2 17.9 59 23 16.2 69 21 R(PT) 3/8 46.5 41.5 23 19 40 35 32.6 53.5 46.1 21

Speed Controller with One-touch Fitting

, 03, 04, 06, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23 16.2 AS331FG-02-12 AS331FG-N02-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-

Combination Cylinder

23 25 45 50 60 70 80 10 12 16 20 25 16 19 23 28 36 8 0 0 0 0 234 261 280 327 356 242 269 288 336 365 Clevis pin, flat washer and cotter pin are packed.

NCQ2/CQ2

YB-03 YB-05 YB-08 YB-10 32, 40 50, 63 80 100 YU-03 YU-05 YU-08 YU-10 32,40 50,63 80 100 17 11 15.8 14 M8 x 1.25 8 7 6 25 6.5 10 18 50 9 80 7 6 40 M10 x 1.5 17 13 19.8 18 10 6.5 12 22 60 11 120 22 20 24.8 23 13 9 8 90 M16 x 2 8.5 16 28 75 14 230 26 26 29.8 28 14 M20 x 2.5 11 10 160 10.5 18 36 90 18 455 179 Compact Cylinder Series (N)CDQ2 Auto Switches High Lateral Load Water Resistant Standard

CL

28 36 42 46 48.5 55 56.5 20 21 23 23 25 8 0 0 0 0 45 50 60 70 80 10 12 16 20 25 6 7 7 11 11 242 269 288 336 365 MXU MXS MXQ Clevis pin, flat washer and cotter pin are packed.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

Valve Single Unit

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

rail) ... ... 20 20 stations SS5Y9-23-05-Q .1 set (Type 23, 5 station manifold base part no.)

Compact Cylinder

T1 Bore size (mm) Joint Applicable mounting bracket 2 x O counterbore 2 x D through B J Type A mounting bracket Type B mounting bracket E 32, 40 50, 63 80 100 YA-03 YB-03 YU-03 YA-05 YB-05 YU-05 YA-08 YB-08 YU-08 Material: Stainless steel (mm) YA-10 YB-10 YU-10 Bore size (mm) D E J M O B Part no.

Fluoropolymer Piping Equipment

LQ1T21-ST1-R39 6 Body size 3 6 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 3.6 LQ1T21-ST2-R41 Body size 3 6 6 20 41.1 36.5 LQ1T32-ST1-R37 8 Body size 3 8 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 5.5 LQ1T32-ST2-R40 Body size 3 8 8 20 41.1 36.5 LQ1T41-ST1-R1 12 Body size 3 12 24 24 21 17 21 34 41.5 34 28 23 28 5.8 LQ1T41-ST1-R37 12 Body size 5 12 24 24 21 26 21 39.5 52.5

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details, refer to page 7-6-23.

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

Valve Single Unit

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.