Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Quick Exhaust Valve Series AQ 1

-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2

Quick Exhaust Valve Series AQ

-06 AQ240F-06-00 13.7 15.4 6.2 40.7 8 6 6 10.0 11.6 6 11.6 40.7 6.2 14.7 26.7 13.7 13.7 AQ340F-06-06 AQ340F-06-00 13.7 19.5 6.3 44.8 13 6 6 11.8 11.6 11 11.6 44.8 6.3 19.6 31.7 13.7 13.7 AQ240F-07-07 AQ240F-07-00 13.7 15.4 6.2 40.7 8 10.0 1/4" 1/4" 12 6 12 40.7 6.2 15.1 27.3 13.7 13.7 AQ340F-07-07 AQ340F-07-00 16.8 20.3 7.1 52.2 13 11.8 1/4" 1/4" 13.2 11 13.2 52.2 7.1 20.0 33.1 16.8 13.7

Table of Contents

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 28 23.5 30 Piping adapter AC25, AC30 AF30, AR30, AW30 AL30, AFM30, AFD30, AWM30, AWD30 30 30 32 AC40 AF40, AR40, AW40 AL40, AFM40, AFD40 AWM40, AWD40 36 36 32 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E500-06 44 40 32 3/4 E600-06 E600-10 3/4 1 AC50, AC55, AC60, AC50B

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

AC Servo Motor Driver (Pulse input type/Positioning type ）

Table 5.10 Selectable input devices Setting Input device (Note 1) value P S T 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP LSP (Note 3) 0B LSN LSN LSN (Note 3) 0D CDP CDP 0E CLD 0F MECR 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP (Note 2) LOP (Note 2) LOP (Note 2) 24 CM1 25 CM2 26 STAB2 STAB2 Note 1.

IIIIIII

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

Mechanical Valves Series NVM, NVFM, NVZNI

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

13

06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

SX

AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

ZFC201-07 ZFC100-06 ZFC101-07 Cover Element (Replaceable) 0.1 1 10 100 Flow rate (l/min (ANR)) Bracket Replacement Parts Description Part no.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

JXCx-OMX0009

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 1A to 10

JXCx-OMT0062

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG (-) 0E ESTOP 0E JOG (+) 0F ALARM 0F FLGTH 10 to 1A