SY

CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN300-03 (Cv = 3.67) SY9140 -04 (Cv = 2.8) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer SGP1/2 x 1m AS420-04 (Cv = 5) AN400-04 (Cv = 5) Features 3 Valve Variations Manifold spec. sheets Order made Type 45 Type 45Single valve A NA Features Precautions

VFR

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

AS-FG/ASD-FG

06 08 10 12 With One-touch fitting Use a 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Table of Contents

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Hydraulic

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

SQ1000/2000

P = 11.5 1 2 3 4 5 6 7 8 ... n: Stations 40.5 Silencer cover L Blanking plug (for One-touch fitting) Dimensions Applicable fitting size d 3.2 4 6 8 A 23 04 06 08 Model A L D KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 This is inserted into cylinder ports and SUP and EXH ports that are not used.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VFS VS VS7 Dimensions VQ7 Applicable fitting size d 4 Model A L D Flat ribbon cable connector assembly KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 Cable length (L) Assembly part no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

CE-compliant P, R port thread type Valve stations Nil Rc Stations Note Symbol 00F 04 G 4 stations 00N Double wiring Note 1) NPT 00T 08 NPTF 8 stations 04 4 stations Specified layout Note 2) SI unit part no. (Up to 16 solenoids) 16 Page SI unit part no. SI unit specifications Symbol 16 stations Nil EX510-S001 NPN output (+ COM.)

Suction Guard (Produced upon receipt of order) FHG Series

) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 56 56 56 76 76 76 101 101 71 71 71 104 104

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5

V

4 06 6 08 8 10 10 13 13 Symbol Thread Dia 2~8 10~16 40~50 20~32 A8 M8X1 Male Thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y P A D T Y P E U Flat C Flat with Rib (Not 2,4,6,8) D Deep (10,16,25,40) B Bellows (Not 2,4) Symbol Port Size 2~8 10~16 40~50 20~32 04 4 Tube Onetouch Tube Fitting 06 6 Tube 08 8 Tube P A D M AT E R I A L N Nitrile Rubber (standard) S Silicon Rubber U Urethane

5 Port Solenoid Valve Series SV1000/2000/3000/4000

02 12 02 04 02 4 stations 4 stations 9 stations 12 stations (2) (2) (2) (2) 2 stations 2 stations 2 stations 2 stations Specified layout (Up to 8 solenoids possible.)

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.

One-touch Fittings

Spare Parts Symbol Size 02 2 23 3.2 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M3, M5, and M6 threads. Gasket for M3 thread: M-3G2 Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G For details on applicable tubing O.D. and port size combinations for each model, refer to the charts on the Dimensions page.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed