Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

AC Servo Motor Driver (Pulse input type/Positioning type ）

818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

AC Servo Motor Driver (CC-Link Type ）

Device 0 9 1 A Trouble 2 B Remote station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

AC Servo Motor Driver (CC-Link Type ）

Device 0 9 1 A Trouble 2 B Remote station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Electric Actuator/Slider Type

5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

AC Servo Motor Driver (Network card type ）

818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M TPH TPS A Connection thread R M D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7

Rotary One-touch Fittings Manifold Series KM

Applicable Applicable Port B min. port size Weight (g) size d D1 Part No. D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Magnetically Coupled Rodless Cylinder

Bore size (mm) D-A73/A80 D-F7NTL Electrical entry (Fetching direction) D-F7NTL Solid state auto switch Type Model Features With timer Grommet (In-line) A B A B A B With pre-wired connector is available for D-F7NTL type, too.

Title not found

Compression nut design resists side loading Nut Seal lock F Seal lock E B Tubing support C D A Tubing Taper surface Tube support resists crimping and deformation of tubing.

Table of Contents

, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(V) A B A B 63 50 40 32 25 Mounting position 63 50 40 32 25 Mounting position 40 32 25 Mounting position A A A 323.5 278.5 157.5 127.5 97.5 278.5 157.5 127.5 97.5 323.5 157.5 127.5 97.5 B B B 136.5 121.5 182.5 152.5 122.5 121.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B U D SS5Y3-45F Stations .

SY

B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .

5 Port Solenoid Valve Series SV1000/2000/3000/4000

U D B(S, R, RS)P PG PH 1 2 02, 03, N9, N11 C8, C10, C12, (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

VQ5000

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) A 4 B 2 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3