VH Series, 4 Way Hand Valve

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

Booster Regulator/Air Tank

D-DN

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

20

coupler plug/one-touch fitting mounting dimensions after installation Width across flats 22 7.5 D 27 32 Note) 14 (Hex.) 14 (Hex.) 156 KK130P-02MS With S coupler plug VMG11-12-X53 With S coupler plug VMG11-11-X53 X-number With One-touch tube fitting VMG11-H06-11-X35m 23 Lever stroke Width across flats 22 23 27 30 B Note) 102 14 (Hex.) 117.5 KQ2H06-11 (02S, 35S) (mm) Type Connection size Model

PSxx-OMU0008CN

() 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1/4 -81No.PS-OMU0008CN-D F02L C01L

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-03SD 5/32" 10.4 25.2 34.4 16 6 18.2 12.8 17 40.7 R 1/4 18.5 7.2 1.2 34.7 17 AS221F-02-08SD AS221F-N02-05SD 3/16" 11.4 24.9 34.2 17 18.2 8 15.2 36.4 27.2 18.5 AS221F-02-10SD AS221F-N02-07SD NPT 1/4 17.5 18.5 7.2 40.7 1.2 34.7 1/4" 13.2 25.2 34.5 18.5 10 18.5 43.2 33.9 21 20 AS321F-02-06SD AS221F-N02-09SD 5/16" 15.2 27.2 36.4 6 12.8 39.3 27.8 17 33.9 43.2 20 21 AS321F-02-08SD AS221F-N02-11SD

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

PSxx-OMM0002CN

NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F LCD (UP) (SET) ) (DOWN) () LCD 4 (UP) ON/OFF (DOWN) ON/OFF (SET) -10No.PS-OMM0002CN-F

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 :

Compact Manifold Regulator Series ARM5

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at handle locked) DIN rail part no.

Dual Speed Controller with One-touch Fitting Series ASD 1

1/4" ASD330F-N01-07S 42.2 25.6 NPT 1/8 13.2 12.7 36.1 31.1 11.8 14.2 32 27 10.6 ASF 38.9 15.8 33.9 31 18.5 5/16" ASD330F-N01-09S 44.8 28.2 15.2 17 1/4" ASD430F-N02-07S 43.9 25.6 13.2 18 55 18.5 5/16" ASD430F-N02-09S 46.5 28.2 41.7 NPT 1/4 17.5 15.2 15 18.5 36.7 29.6 34.6 11 40.4 35.4 21 3/8" ASD430F-N02-11S 49.3 31 19.7 62 18.5 17 1/4" ASD530F-N02-07S 48.7 25.6 13.2 20.3 76 18.5 5/16" ASD530F-N02

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.