2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

0.4

D-sub Note 1) M12 CC-Link Note 1) D-sub S kit: IP40 specification (IP67 specification for all other S kits) Note 2) For SI unit part number, refer to page 1.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

SX

.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

SV

Connector U D B 1 2 02, 03, N9 N11 C8, C10, C12, (-D) Stations Tie-rod base manifold: SS5V4-10FD (S, R, RS) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

A

I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT Courtesy of Steven Engineering

5 Port Solenoid Valve

D-sub Note 1) M12 CC-Link Note 1) D-sub S kit: IP40 specification (IP67 specification for all other S kits) Note 2) For SI unit part number, refer to page 1.

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) 85.2[87.4] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5[64.5] + 54 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX

Valve Single Unit

Serial unit can be mounted on D side only. Valve stations SUP/EXH block assembly mounting position Note Stations Symbol 02 2 stations Mounting position Symbol Stations Double wiring specifications D U D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations 08 8 stations How to Order Valves 02 2 stations Applicable up to 16 solenoids.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

SYJ300/500/700

VT 2-4.5 (For mounting) 40 4 (Light/Surge voltage suppressor) VP VG M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 VP 26 20 X S070 1/4, 1/8 (P, R port) 23 15 48 VQ VKF VQZ L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10

Table of Contents

D-J79W D-F79F, D-F7NTL D-F7BAL 32 to 50 D-A79W D-F7WV D-F7V D-F7BAVL D-A73C D-A80C D-J79C RS H A D-A7 D-A8 RZQ MI W S CEP1 U U U U CE1 A B CE2 32 to 50 ML2B D-A9V D-M9V D-F9WV D-F9BAL D-A9 D-M9 D-F9W C J G5-S U U B CV MVGQ CC A RB Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) J D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAVL D-F7BAL D-F7W D-J79W

ZP3

F N S U F GN GS 02 10.8 7 2 1.4 KQ2H02-M5N 3 6 10 15 20 ZP3 T 10 13 16 B J JB K 04 14.7 8 4 2.5 KQ2H04-M5N Width across flats E 06 10 6 KQ2H06-M5N D Dimensions Per Vacuum Inlet: Barb Fitting Model D Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19