V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ5140-M(Lead wire length) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VFR

x 1 m A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

EA EB P M5 x 0.8 62.8 107.2 [111.6] (Lead wire length) G: Approx. 300 H: Approx. 600 (Pilot EXH port) 22 50.6 [57.6] 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D, Y): 10-SY5240(R)-02 M8 connector (WO): 10-SY5240(R)-WO-02 D Y Applicable cable O.D. 3.5 to 7 (Lead wire length) 127

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Vacuum Pad

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Modular F.R.L. Unit

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 25 Air Filter AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (accessory) L Bracket (accessory) F D M G K K F M J J B E E B OUT IN H C OUT IN H C Port size OUT OUT Port size o s Drain A P Min. clearance for maintenance 25 AF30, 40, 40-06 L Bracket (accessory) A D G F M K J 40 B E Drain Min.

SX

M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Table of Contents

D. Applicable tube O. D.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) 85.2[87.4] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5[64.5] + 54 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX

Compact 5-Port Solenoid Valve

layout*2 (Up to 16 solenoids available) e Number of cores (Lead wire) r Lead wire length 1 0.6 m 2 1.5 m 3 3 m 24 24 stations 16 16 stations L1 34 cores L2 17 cores L3 9 cores L3m: 9 cores Symbol Stations Note 02 2 stations Double wiring*1 4 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) y P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations

Series SV

Stations (S, R, RS) U D B 02, 03, N9 N11 C8, C10, C12, (-D) 1 2 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.