CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

REC

, D-H7NF, D-F7BAL Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-01 Reed BA-32 BA-02 BA-04 Solid state *Mounting screw set made of stainless steel Use the following mounting screw set made of stainless steel according to operating environment.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

flats H E E A B 2-P 2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats

Series VQ Base Mounted Metal Seal/Rubber Seal

O A B C D E F1 G H J1 J2 K Q R1 R2 V Without SI unit With general type, Series EX300 Stations (3) DIN rail mounting D (1) Cylinder ports 01 1 station Special wiring specification SI unit for MELSECNET/MINI-S3 Data Link System (Mitsubishi Electric) SI unit for SYSBUS Wire System (OMRON) SI unit for Satellite I/O Link System (Sharp) (4) K port size VQ0 VQ1000 Symbol (Not double wiring

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

VQZ1000/2000/3000

Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-M9A D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G59F D-F5 D-J59 D-F5W D-J59W D-F59F D-F5NT Note 2) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44C D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A9V D-M9V D-M9WV D-M9AV Note 2) D-P4DW D-P3DW Hs Ht Hs Ht Hs Hw Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs

7ND9071en

Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C IP66 CSA 08.1980091

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

0.4

B Note 2) D D Note 4) Nil None With DIN rail (Rail length: Special) Note 9) 1 1 station K Note 5) Special wiring spec.

42

0 Cable length 0.6 m 1 Cable length 1.5 m 2 Cable length 3 m 01 1 station 12 12 stations Electrical entry SB Direct exhaust with silencer box: Exhaust from both U and D sides Cylinder port D D side entry U U side entry 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed SD Note 1) Direct exhaust with silencer box: D side exhaust SU Note 1) Direct exhaust with silencer box: U side exhaust W IP65 enclosure

Series VQ Metal Seal/Rubber Seal Body Ported

How to Order Manifold D 1 4 08 2 VV5Q T Series Option Manifold 0 1 2 VQ0 VQ1000 VQ2000 (2) DIN rail mounting Special wiring specification (Not double wiring) With name plate Built-in silencer {Direct exhaust (U side only)} D K N S 4 Plig lead unit/Flip (3) Stations 01 1 station Note 1) When specifying more than one option, please list alphabetically.

ZP

-B5 ZP3-Y06B;K -B5 Width across flat 6 Width across flat 6 7 7 Width across flat 10 Width across flat 10 2 2 2 2 8 20 A B D A B D M5 x 0.8 M5 x 0.8 M8 x 0.75 M8 x 0.75 4 4 8 20 13 13 7 6 3.4 1.8 1.8 3 2.2 4 4.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) A A B D B D Non-rotating (J) Rotating (K) Non-rotating (J) Rotating (K) Model Model 8 8 ZP3-Y04B:3-B5 ZP3-Y04B

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.