Electric Actuator/Slider Type

How to Order q w e r t y u i o !

SQ1000/2000

list e q w e w y No.

MY1

Special resin Carbon steel Description No. q w e r t y u i o !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

15

] F LEY63 Workpiece Load: F [N] 10 LEY32 LEY25 Center of gravity 1 0 100 200 300 400 500 600 700 800 900 1000 Stroke [mm] 852 Motorless Type Electric Actuator/ Rod Type LEY Series LEY25, 32, 63 How to Order q y u i o NZ 25 500 B w LEY e r t H q Accuracy w Size r Motor type t Lead [mm] y Stroke [mm] Symbol LEY25 LEY32 LEY63 A 12 16 (20) 20 B 6 8 (10) 10 C 3 4 (5) 5 L 2.862 25 32 63 Nil Basic

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

2/3 Port Valve

Description 10 5 1 AC Standard Brass VX22 Body Core assembly Stainless steel q DC Note 1) Dew point 10C or less. Note 2) 50 cSt or less. Note 3) Valve on option "V", "M", "Y" (Non-leak, vacuum).

Modular F.R.L. Unit

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

VFS

0, Terminal i, Metal joint q, w, Gasket e, r, O-ring y, u, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u End plate (U) !1, Metal joint q, w, O-ring t, y End plate (U) !1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !

V

F S TAT I O N S 02 2 Stations to 20 20 Stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) B3T One Touch Fitting 5/32 B7T One Touch Fitting 1/4 ACCESSORIES M A N I F O L D T Y P E 40 S I D E P O R T E D T Y P E G DXT200-8-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 52 68 84 100 116 132 148 164 180 M5x0.8 L2 43 59 75 91 107 123 139 155 171

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 @5 @6 !2 !7 @7 !9 @3 !8 @0 !1 w N@4 !6 !

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

C85

1 y q r e i !2 o !

•

K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.