V100

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)

This is a legacy product, and replaced byPI051-04F

This is a legacy product, and replaced byVHK3A-04F-04FR, VALVE, FINGER, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .03403 lb

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

Size: 2 (2-port Valve), P Side Port Size: 01S (R1/8), A Side Port Size: 04F (Ø4)

Size: 3 (3-port Valve), P Side Port Size: 04F (Ø4), A Side Port Size: 01S (R1/8)

This is a legacy product, and replaced byVHK3A-04F-04FL, FINGER VALVE, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .06973 lb

This is a legacy product, and replaced byVHK2A-06F-04F, FINGER VALVE, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .04082 lb

This is a legacy product, and replaced byVHK3A-06F-04F, FINGER VALVE, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .05447 lb

This is a legacy product, and replaced byVHK3A-04F-01S, FINGER VALVE, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .10544 lb

This is a legacy product, and replaced byVHK2A-04F-04FRL, FINGER VALVE, VALVE, VHK2 FINGER VALVE, UA, VHK2 BUILT IN FITTING <1/4, .07795 lb

VS 8-2/VS 8-4

For Rc 1/8" AXT954-01 For Rc 1/4" AXT954-02 For Rc 3/8" AXT954-03 For Rc 1/2" AXT954-04 For NPTF 1/8" AXT954-01T For NPTF 1/4" AXT954-02T For NPTF 3/8" AXT954-03T For NPTF 1/2" AXT954-04T For G 1/8" AXT954-01F#1 For G 1/4" AXT954-02F#1 For G 3/8" AXT954-03F#1 For G 1/2" AXT954-04F#1 This is used to plug the cylinder ports when using as a 3-port valve, etc. 26 Series VS 8-2/VS 8-4 S R S R

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 06F (Ø6), A Side Port Size: 04F (Ø4)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04F (Ø4), A Side Port Size: 01S (PT 1/8)

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 06F (Ø6), A Side Port Size: 04F (Ø4), Knob Color: R (Red), Bracket: L (L Bracket)

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: 04F (Ø4), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)