Table of Contents

Plug-in type with terminal block: 6 stations Non plug-in type: 6 stations VQ7 VV5FR5-10T-061-041 set (Manifold part number) VFR5100-5FZ 3 sets (2 position single) VFR5200-5FZ 2 sets (2 position double) VVFS5000-10A1 set (Blanking plate assembly part no.)

A_HEC-OM-J017

2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

HEC-OM-S008

06 32 0D Set at +1.50 deg.C 37 Temperature setting (with writing FRAM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing FRAM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HECR 4-8 MODBUS communication function 5 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

JXCx-OMX0009

Please refer to the content of Rx1B. 3B station READY (No used) 3C to 3F CC-Link system area 40 to 6F 70 to 7A CC-Link system area Only at Full numerical data instructions Remote The content of Remote station READY is as same as at Single numerical data instructions.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

JXCx-OMT0062

Please refer to the content of Rx1B. 3B station READY 3C to CC-Link system area 3F 40 to 6F 70 to CC-Link system area 7A Only at Full numerical data instructions Remote The content of Remote station READY is as same as at Single numerical data instructions.

5 Port Solenoid Valve

(The solenoid valve does not have polarity.) 3) Remove the screw with washer (3f) from the bracket (3e). (For Y-shape type terminal, loosen the screw.) Mount crimped terminal (9) as shown below, and then re-tighten the screw (3f). Note) Tighten within the tightening torque of 0.5Nm+/-15%. Note: a) Wiring is possible with a bare lead wire.

Electro-pneumatic proportional valve

Remove the self-up screw 3f from the bracket 3e (loosen it if using a Y shaped crimped terminal), mount the crimped terminal 3 as shown in the figure and fasten the self-up screw 3f again. The tightening torque should be within 0.5Nm+/-15%. 9 VEP-OMM0002-C VEP / VEF / VEA / VER Series Specific Product Precautions 4 Be sure to read before handling. VEA25 Wiring 2.

Direct Operated 3 Port Solenoid Valve

Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw (3f) from the bracket (3e). (Loosen in the case of Y-shape type terminal.) As shown in the right figure, mount a crimped terminal (9), and then again tighten the screw (3f). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a) It is possible to wire even in the state of bare wire.

3 Port Solenoid Valve

Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw (3f) from the bracket (3e). (Loosen in the case of Y-shape type terminal.) As shown in the right figure, mount a crimped terminal (9), and then again tighten the screw (3f). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a) It is possible to wire even in the state of bare wire.

3 Port Solenoid Valve

Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw (3f) from the bracket (3e). (Loosen in the case of Y-shape type terminal.) As shown in the right figure, mount a crimped terminal (9), and then again tighten the screw (3f). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a) It is possible to wire even in the state of bare wire.

3 Port Solenoid Valve

Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw (3f) from the bracket (3e). (Loosen in the case of Y-shape type terminal.) As shown in the right figure, mount a crimped terminal (9), and then again tighten the screw (3f). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a) It is possible to wire even in the state of bare wire.

AC Servo Motor Driver

Setting Control modes (Note 1) P S T 00 01 For manufacturer setting (Note 2) 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP 0B LSN LSN 0C For manufacturer setting (Note 2) 0D CDP CDP 0E to 1F For manufacturer setting (Note 2) 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP LOP LOP 24 CM1 25 CM2 26 STAB2 STAB2 27 to 3F For manufacturer setting (Note

LEC-OM069xx

) and Subcommands Subcommand CODE Main Command ALM_RD PPRM_ LTMOD_ LTMOD_ NOP PRM_WR SMON WR ON OFF 3F SVCTRL Note: : Can be combined, : Can not be combined 8-78 8 MECHATROLINK-II Commands 8.14 Command Related Parameters List This chapter describes the following parameters related to command actions.

VP4_50-OMU0001

3d (P ) 3 (P ) 2-3.5 b)O 1.25mm 10 (VVP460 8 ) 2-4 Y 1.25 mm c)612mm 912mm VP4350() P 3 ( P AorB ) )VP4350 () VP4450() A B EA EB () ()0() DIN 1 1) 1)() 2) 2)2a 2b 3)3a 3)2a 2b 4) 2. 0.5Nm20% 1) 90 2) No.12 (+/-) 3)3e 3f(Y ) DIN DIN , +COM-COM 3f 0.5Nm15% 1 A 2 B 3 COM 8 VP4_50-OMU0001 (EA,EB ) () (PE) 9 VP4_50-OMU0001 Ass'y 1 (ISO VG-32) Ass'y Ass'y Ass'y

VFR5000-OMN0001

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

JXCx-OMT0023

ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0 21 to 23 For manufacturer setting (Note 2) 24 TSTP 25 For manufacturer setting (Note 2) 26 DOG 27 PI1(3) 28 to 2B For manufacturer setting (Note 2) 2C DI0 2D DI1 2E DI2 2F to 3F

AC Servo Motor Driver (Pulse input type/Positioning type ）

05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2 -0.6 A B C D E F 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 9.7 9.4 9.1 8.8 8.3 7.8 7.4 7.0 6.7 6.4 6.1 5.9 5.6 5.4 5.2 5.0 4.9 4.7 4.5 35.2 33.1 31.3 29.6 28.1 26.8 25.6 24.5 23.4 22.5 21.6 20.8 20.1 19.4 18.8 18.2 97 93 90 86 83 80 77 75 72 3A 3B 3C 3D 3E 3F

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E 4.7 1F 72 3F