0.4 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Dimensions Formula: L1 = 17.5n + 52, L2 = 17.5n + 106 n: Stations (Maximum 16 stations) 16 332 386 412.5 423 15 314.5 368.5 400 410.5 14 297 351 375 385.5 13 279.5 333.5 362.5 373 12 262 316 337.5 348 11 244.5 298.5 325 335.5
wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =
mounting) (7.5) (81) (When circular connector is mounted) 11.8 B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 160.5 150 132.2 14 80 3 173 162.5 148.2 12.5 96 4 198 187.5 164.2 17 112 5 210.5 200 180.2 15 128 6 223 212.5 196.2 13.5 144 7 235.5 225 212.2 11.5 160 8 260.5 250 228.2 16 176 9 273 262.5 244.2 14.5 192 10 285.5 275 260.2 12.5 208 11 310.5 300 276.2 17
pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A
Location Direction A, B port specifications Rc 1 4 Rc 1 4 M5 x 0.8 P, EA, EB port Port size A, B port C4 (One-touch fitting for 4) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n:
pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2 A A A 4 4 4 B 25 2 A Dimensions Formula L1 = 22n + 24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 L1 L2 L3 354 244
) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations
6 one-touch fitting R2 P R1 3 1 5 n... 7... 6... 5... 4... 3... 2... 1...
[3(R) EXH port] (Double sided type: C12) Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch
(Note 6) SSCNET cable (option) 10k Plate SD 2m Max CN1A SW1 (Note 8) SW2 CN1B 2 1 (Note 1) Between electrodes MR-J3-B LECSS-S (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 MR-J3-B (Note 7) LECSS-S (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2
barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6
/4000 Kit (Terminal Block Box Kit) Conforms to IP67 VV5QC41 L2 6.5 79.5 L1 65.5 P = 25 Indicator light 7 Manual override 163 9 9 A B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc
VQ5 Stations n: Station (P , EA, EB port) 4 195 207 5 228 240 2 129 141 3 162 174 6 261 273 7 294 306 8 327 339 Formula L1 = 33 x n + 63 L2 = 33 x n + 75 L L1 L2 VQC VQZ Manifold: Non Plug-in Type SQ VV5FR3-10Station 1Port size VFS 44 44 U side 79 48 14.5 9 VFR 63 (A, B port) 2n x 3/8", 1/4" C8, C10 Applicable cable O.D. 8 to 10 R4.5 VQ7 A (A, B port) n B A (Pitch) 3 P=33 B L1 6 L2 A (Pitch
Location Direction A, B port specifications Rc 1 4 Rc 1 4 M5 x 0.8 P, EA, EB port Port size A, B port C4 (One-touch fitting for 4) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n:
Location Direction A, B port specifications Rc 1 4 Rc 1 4 M5 x 0.8 P, EA, EB port Port size A, B port C4 (One-touch fitting for 4) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n:
3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24
[3(R) EXH port] (Double sided type: C12) Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 12 3 3 X 49.5 B B B B B B B B P X P12 30 25 1 A 1 A A A A A A A 13.5 10 (12) (7.5) 25 C10: 10 One-touch
VQD Manual override Indicator light L2 L1 79.5 6.5 P=25 65.5 72 R4.5 46 Mounting hole for 2-M5 B A B A A A B A B A B A 9 A A A A A A A 143 163 42 80 34.5 R4.5 B B 9 B B B 55.5 SI unit 10 101 Stations D-side U-side 1 2 3 4 5 6 7 8 n Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2 = 25n + 192 n: Stations n L L1 L2 1 131 217 2 156 242 3 181 267 4 206 292 5 231 317 6 256 342 7
/2000/4000 Kit (Terminal Block Box Kit) Conforms to IP67 T 1in = 25.4mm VV5QC41 L2 6.5 79.5 L1 65.5 P = 25 Indicator light 7 Manual override 163 9 9 A B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port)
points) IP67 compliant Indicator light Manual override L2 L1 10 59.5 35 58.5 (n-1) x 41 41 179 (Single, Double, 3-position: Rubber seal type) B B B B A A A A A 184.5 (3-position: Metal seal type) 61 107.8 9 A A A A A R1 5 R2 3 179 29.5 29.5 1 P 106 PE 9 B B B B B 12 19 SI Unit 21 3 x 3/4" 1(SUP), 5(R1), 3(R2) port 47.5 1/8" (Pilot EXH. port) n D side U side 5 4 3 2 1 6 Station 1/2" <3(R)