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Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: K (mm) CRB2 L3 max X W1 L1 max (mm) Shaft type CRBU2 Y W2 L2 max L4 max Size J K T J K T J K T J K T W1 = L3 = L1 = Size 50 50 11.5 to 39.5 1 to 6 1 to 6 Y-3 L2-2 11.5 to 39.5 L1-2 X-3 L4 = CRB1 L2 = Y = 63 63 12.5 to 45 1 to 7.5 1 to 7.5 Y-3 L2-2 12.5 to 45 L1-2 X-3 80 80 13.5 to 53.5 1 to 8.5 1 to 8.5 Y-3 L2-2 13.5 to 53.5 L1-2 X-3 X = MSU 100 100 18.5 to 65 1 to

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Modular Type Regulators Series AR

AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 4.5 6.5 30 25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3 26 32.5 16 6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length

A

www.stevenengineering.com I 5.17 AIR PREPARATION MODULAR TYPE ACCESSORIES BRANCHING UNITS H O W T O O R D E R "T" TA K E-O F F Y A P P L I C A B L E FRL S E R I E S 1 1000 2 2000 3 3000 4 4000 5 4000-06 6 5000, 6000 Fits between modular units using 'Y' Type Connectors Cannot be installed adjacent to combined filter/regulator unit D I M E N S I O N S T TA K E O F F D I M E N S I O N S X TA

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AW20 (K) to 40 (KJ !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

o o r P ) a P M ( g i s p ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r P . r e p O . x a M ) 0 . 1 ( 0 5 1 a i d e M l i O , r e t a W e r u t a r e p m e T d i u l F d n a t n e i b m A ) C 0 6 ~ 5 ( F 0 4 1 ~ 0 4 l e d o M A B C D E F G H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2

Table of Contents

(3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4-6 7 Cylinder Speed Chart Use as a guide for

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

DIQ-69200-OM002

Analogue output Voltage type (ITVH2020-1) Analogue output Current (sink) type (ITVH2020-4) Only use equipment with a minimum load impedance of 100 k. Only use equipment with a maximum load impedance of 250 .

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

PFxx-OMS0001CN

6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

High Vacuum L Type Valve

90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.

High Vacuum L Type Valve

52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

High Vacuum L Type Valve

9 13 XL-OMV0007 6.

IZx-OMP0064

6 4 4 2 2 0 0 0 500 1000 1500 2000 0 300 600 900 1200 1500 mm mm Installation distance [mm] Installation distance [mm] 6-2.

High Vacuum L Type Valve

104 39 9 13 XL-OMV0003 6.