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(D)/ itv:zszar-oDoG01T o.r3(32) Dia 2Mounting hol3 5 .g g I I lc32Nom. (M5) 2ports (PEPort) w/titr. 2.66(67.6) q I L typ. plug connector/tl\25220-Oloo-017 . ' type plug connctor/f X25220-OMOO-017 : I : With indicator light and surge loltage suppressor (D NVZ5000 Bodu ported ,bpe / B position inch(mm) DIN connec-tor (D)/ 3 N\rz542G.ODOO-0tT 5 crommet/Nl/zs32O-oG.

VQ5000

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

Plug-in/Plug Lead: Single Unit

(Station 5) W5Q55-05042Cz1 set VQ5150-5G 2 sets VQ5250-5G 2 sets VQ5350-5G 1 set 5 VQ5000 W Dusttight/Low jetproof type (IP65) Type of actuation Manual override 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 1 2 3 4 5 6 Prefix the asterisk to the part nos. of the solenoid valve, etc.

Parallel Style Air Gripper: Wide Type Series MHL2

3!6@6 <16 to 25>eo!0 !4!6@6#0 <32, 40>ei!4!

NVZseies

22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

3 Way,3 Port Solenoid Valve NVZ Series

22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

Series: 350 [3 Port COM (Single Unit)], Voltage: 2 (200VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 200VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Table of Contents

override Direct manual override G 1/2 electrical entry G 1/2 electrical entry 5-Rc 3/8, 1/2, 3/4 5-Rc 3/8, 1/2, 3/4 ( ): Rc 3/4 ( ): Rc 3/4 3-8-89 90 Series VFS5000 2 position single/double, 3 position closed center/exhaust center/pressure center/double check Non Plug-in 2 position single: VFS5110-E, VFS5110-D 2-7 mounting hole 5-Rc 3/8, 1/2, 3/4 Rc 3/4: 3(R2), Rc 1/2: 5(R1) G 1 2 Applicable

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Air Slide Table Series MXQ

* 3 3 #) Applicable bore size ' ;< /" 6 :)3) #<= ' ;< ;< :)3) ,-!* 3 3 ' 7> -!* 3 3 :)3) #<= ' ? @ . ? 5 ! 5 @ . 2 ) 5 !))5 5 ! 5 ,!

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1, 2, 3 and 4.

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

45

A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master