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(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of C96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON SOCKET

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of CP96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON

2 For 40 to 100 12 BUSHING 1 32 TIE ROD 4 13 HEXAGON SOCKET CAP BOLT 4 33 TIE ROD NUT 8 14 HEXAGON SOCKET CAP BOLT 2 34 WEAR RING B 1 15 WEAR RING A 2 35 ROD END NUT 1 16 PISTON SEAL A 1 36 MAGNET (1) For MDWB 17 ROD SEAL A 1 37 ROD SEAL B 1 18 GASKET 1 38 PISTON SEAL B 1 19 ELEMENT 1 39 CUSHION SEAL 2 20 RELEASE BOLT 1 40 CUSHION VALVE SEAL 2 41 CYLINDER TUBE GASKET 2 43 - Revision history

: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VFR3000-OMJ0001-A / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / () ( ) () 1 DC 3 3 () 3 EXH (VVFS3000-R-03-12 ( ( ( ( ) ) ) ) 0.1

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR6000-OMQ0001 / / / / 1 1 3) 3) 1 1 () 3 VFR6000-OMQ0001 VFR6000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() ( ) () () 3 ( ) () 3 4 VFR6000-OMQ0001 VFR6000 Series 5 / -10 1 1 ( ) Rc Nm Rc 1/8 7~9 Rc 3/4 28~30 Rc 1 36~38 5

P23 -1- *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1.

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP4_50-OMU0001 / 1 1.5 *3) *3)1 1 () 3 VP4_50-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 / () () () () 0.1 2 3 VP4350 C-R ( )C-R 3 ( DC 5% AC 15% ) (SSRTRIAC )AC 1) 3 (C-R ) OFF 2)() ZNR 1V 4 VP450-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 / ( ) (1) ()COMCOM

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT315**-OMH0005-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 VT315**-OMH0005-A VT315 Series VT315 Series VT315 Series VT315 Series 3 3 3 3 / / / / / / / / 3 () C-R ( )C-R DC 5% () () () ( ( ( ( ) ) ) ) () AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT325-OMT0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VT325-OMT0001 VT325 Series VT325 Series VT325 Series VT325 Series 3 3 3 3 / / / / / / / / C-R ( ) C-R DC 2% AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC AC 1 (C-R ) OFF 2)() 1V -10 ()

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Prior to the shipment of a SMC product to another country, assure that all local rules governing that export are known and followed. -3- 1. Product Specifications 1-1.

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

(Part 1: General requirements) ISO 10218-1992:Manipulating industrial robots-Safety. JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4.

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1.. 2. 3. 1. 2. 3. 4. 2 VT301-0MP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VT301-0MP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / / / / / -10 1 Nm Rc1/8 79 Rc1/4 1214 1224 1/8 1 21 ISO VG32 MSDS 2 ISO VG32 4 VT301-OMP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / 30 1 1 ISO VG32 2 ISO