Compact Vacuum Unit None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead
Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5
Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.
less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) (4) Air consumption Rc 1/4 Rc 1/4, 3/8, 1/2 Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/8 Port size Rc 1/8 (2 locations) Pressure
ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description
of full span Air consumption (At supply pressure of 1.0 MPa) (5) SRH 11.5 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14
Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.
VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8
2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port
of full span Linearity SRP (4) Air consumption 11.5 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass
2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port
VNl VQ 4.3-3 2 Port Solenoid Valve SeriesVQ20/30 For Dry Air, Pilot Operated Single Unit How to Order Valve VQ A C6 2 1 1 1 G Series/Orifice Option Series VQ20 VQ30 Effective orifice 3.4mm 4.8mm : None Symbol 2 3 F: With bracket Switching N.C. (A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".
Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature
OUT L FKM (2) Note) High corrosion resistant specification used for armature material. 1 Thread type IN (1) Rc G NPT Nil F N N.O.
5 Length symbols Applicable stations [L = 12.5 x + 10.5] : Length symbols 1 to 40 01 1 L = 23 to 40 L = 510.5 For 1 station manifold to 10 For 10 stations manifold L rPort plug assembly VVQZ2000 CP tPort plug assembly 1.25 P=12.5 5.25 7.5 ZK2 MP1C6 A 35 25 5.5 yOne-touch fitting assembly VVQ1000 51A C8 L Dimension L = 12.5 x n + 10.5 No.
(mm) A B C D E F G H J L Port size Bracket part no.
ZQ-OM01301-A 7.3 How to Order Replacement Parts 1 Pilot valve for supply/ release Pilot valve for N.C. supply/ release Z1-V114-5LUB-A A (1) (2) (1) Electrical entry L L-type plug connector, with 0.3 m lead wire LO L-type plug connector, without connector (2) Manual Nil Non-locking push type B Slotted locking type N.O. supply pilot valve (including adapter plate) ZQ1-V124-5MUB-A (1) (2) (1