volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL
If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC5V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Spool, Seal Type
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: R (3VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: V (6VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: R (3VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: V (6VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: V (6VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)