A x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.
(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.
Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8
LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M3 x 0.5 M4 x 0.7 0.9 1.4 M3 x 0.5 M5 x 0.8 0.9 3.0 M4 x 0.7 M6 x 1 1.4 5.0 M5 x 0.8 M6 x 1 3.0 5.0 M5 x 0.8 3.0 M6 x 1 5.0 When using the thread on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque [Nm] 6 Max. screw-in depth L [mm] Model Model Bolt Bolt LEHZ
Use bolts that are between the maximum and minimum screw-in depths in length. 42 Series LESH Dimensions: Symmetrical Type/L Type LESH16L depth 5 5 +0.03 +0.01 3 x M5 x 0.8 thread depth 8 (D/2 1) x C C A-A 19 5.5 13 G x M6 x 1 thread depth 12 D x M5 x 0.8 thread depth 6.5 Note 4) 37 2.5 45 29 A 10.5 9.5 5.1 24 72.5 2 Motor cable (2 x 5) 22.5 17.5 9 35.5 depth 5 +0.03 +0.01 5 A 15.5 17 35
GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable
Body fixed A L Maintenance L (mm) A (mm) 20 24 30 31 Model Bolt Warning LEF;16 LEF;25 LEF;32 LEFS40 3.5 4.5 5.5 6.6 M3 M4 M5 M6 Maintenance frequency Perform maintenance according to the table below.
, , 17 8 M4XO.7. ,M12x,.o 12 2D . ~17 : gl ' 1, 5. . 13 t 8 20 \ 7 6.5 , 8 1 5 +0. ~ 0;" '" ~ 065 18.5 15 12 14 , 20 24.5 15.5 6 M5 XO.8 M14 X1.0 6 8 1 0 6 "'2 . 24 \ 9 8 22 8.~ I --Series CJP Trunnion Mount: CJPTi Without Auto Switch u ex ~ lrllnl'l'O(1 Mount T Bore size S I z r zz ~ (mm) 5" 1081 15" 20 91 3pst !
Max. tightening torque [Nm] Model Bolt LER10 LER30 LER50 M4 x 0.7 1.4 M5 x 0.8 3.0 M6 x 1 5.0 11 Series LER Electric Rotary Table/ Specific Product Precautions 2 LER LECP6 LEC-G LECP1 LECPA Model Selection Specific Product Precautions Be sure to read before handling. Refer to back cover for Safety Instructions and the Operation Manual for Electric Actuator Precautions.
Stroke adjustment unit mounting diagram Stroke adjustment unit Stroke Adjustment Unit Symbol Right side stroke adjustment unit Intermediate fixing spacer Example of L6L7 attachment Left side Right side L: With low load shock absorber + Adjustment bolt L unit Short spacer L unit Long spacer Without unit With short spacer With long spacer SL L L6L L7L SL6 LL6 L6 L7L6 SL7 LL7 L6L7 L7 Without
x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model
high load shock absorber + adjustment bolt Without unit With short spacer With short spacer With short spacer With long spacer With long spacer With long spacer MY3M Spacer length SH7 AH7 A6H7 A7H7 LH7 L6H7 L7H7 HH7 H6H7 H7 SH6 AH6 A6H6 A7H6 LH6 L6H6 L7H6 HH6 H6 H7H6 SH AH A6H A7H LH L6H L7H H H6H H7H SL7 AL7 A6L7 A7L7 LL7 L6L7 L7 HL7 H6L7 H7L7 SL6 AL6 A6L6 A7L6 LL6 L6 L7L6 HL6 H6L6 H7L6 SL
Auto switch Cylinder bore size Nil Without auto switch (Built-in magnet) Refer to the table below for auto switch model numbers. 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm Stroke adjustment unit Symbol Without adjustment unit Stroke adjustment unit MY3A, MY3B Applicable model Nil L H LS SL HS SH LH HL With shock absorbers for low load on both sides With shock absorbers
Protective Cover Specifications 16 20 25 32 40 50 63 Air Double acting MY1MW: 0.15 to 0.8 MPa; MY1CW: 0.1 to 0.8 MPa 1.2 MPa 5 to 60C Air cushion Non-lube Bore size (mm) Fluid Action Operating pressure range Proof pressure Ambient and fluid temperature Cushion Lubrication Symbol Air cushion 1000 or less +1.8 0 2700 or less , 2701 to 3000 +1.8 0 +2.8 0 1001 to 3000 +2.8 0 Stroke length tolerance M5
, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9NW, Lead Wire Length(m): 0.5, Lead Wire Connector: M8 3‑pin plug connector, The number of the switches: 2, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None
, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None
, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None
, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None
volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL
Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: R (3VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)