O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

No more element replacement!

Exceeding this pressure range may increase the load applied to the filtering plate when the element is compressed, causing malfunction. 6 Series FN1/FN4 Construction FN11l1l-10-Sl FN11l2l-10-Sl r i u y o q t IN OUT IN OUT w e DRAIN DRAIN Replacement Parts Component Parts Note No. Description Quantity No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Table of Contents

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

-fl Seies

3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

Air Cylinder

+ Stroke (in) G K C B S SL D Bore (in) Y WF E P ZM AO EE LD EA AA AL KK DD AH AE AT MM A AB R 1.26 0.41 3/8 1 1/8 1 1/4 5.78 9/16 150 (1.5") 1.71 1 2 2.36 5.78 7/16 3/8 3.78 0.3 2.02 1 7/16-20 1/4-28 1 3/16 2 3/16 1/8 5/8 3/4 3/8 1.43 1.26 0.47 3/8 1 1/8 1 3/4 5.82 9/16 200 (2") 1.71 1 2 1/2 2.4 5.82 9/16 3/8 3.82 0.3 2.6 1 7/16-20 5/16-24 1 7/16 2 11/16 1/8 5/8 3/4 3/8 1.84 1.3 0.47 3/8

DeviceNet-E

The accuracy guarant ee : t o 100% FS. 8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons Thi s product i s connect ed t o t he f i el d bus ( D evi ceN et ) as a sl ave. M ast er Pow er SU P. ( D C24V) D evi ceN et Sl ave1 Sl ave2 The pressure proportional to the signal on the second side is obtained.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

Process Gas Diaphragm Valve

Direction of a raised rectangular section indicate open/close status Open Close Air Operated Type AP SL Series AZ3542 and 4542 Height Weight 55mm AZ AZ Compact and lightweight by making the actuator shorter AK 220g BP M5 actuation port 1107 Series AZ Air operated type Manually operated type Series AZ3542/AZ4542 Series AZ3652/AZ4652 Body material User-friendly forged body Rounded corner for

SV

Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground G D G D Power supply 24 V 0 V 0 V 24 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

SX

ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

SZ3000

ON when normal, flickers when voltage is low) (Light ON when normal, flickers when voltage is low) SEND Normal: Blinks, Abnormal: Blinks slowly Transmission indicator Transmission indicator SEND SEND Normal: Blinks, Abnormal: Light OFF or ON Normal: Blinks, Abnormal: Light OFF or ON Uni-wire System Uni-wire H System S-LINK System Send unit: SD-120 Send unit: SD-H2 S-LINK controller: SL-CU1

Series SV

Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V 0V 0V 24V The example above uses a dedicated S-LINK flat ribbon cable SL-RCM00.

Direct Solenoid

0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

45

line Master unit SI unit SI unit Power supply {24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Power supply {24 V 0 V Type 3 ground Crimped connector SL-J1A Type 3 ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

45

line Master unit SI unit SI unit Power supply {24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Power supply {24 V 0 V Type 3 ground Crimped connector SL-J1A Type 3 ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

Valve Single Unit

line Master unit SI unit SI unit Power supply {24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Power supply {24 V 0 V Type 3 ground Crimped connector SL-J1A Type 3 ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.

Valve Single Unit

line Master unit SI unit SI unit Power supply {24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Power supply {24 V 0 V Type 3 ground Crimped connector SL-J1A Type 3 ground Power supply {24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCMl00.