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Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYM2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

Single numerical data instructions (1 Stations occupied) [Remote IO] PLC memory PLC memory address Signal name address Signal name Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 1A to 10

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.

Metric size Inch size Control 3.2 23 01 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Meter-out Meter-in 0 1 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 With One-touch fitting Use 1/8" tube. 15-9-92 2 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F-02 Inlet pressure: 0.5 MPa Inlet

Budafoki ut 107-113, 1117 Budapest Phone: 01-204 4366, Fax: 01-204 4371 Sweden SMC Pneumatics Sweden A.B. Ekhagsvgen 29-31, S-14105 Huddinge Phone: 08-603 07 00, Fax: 08-603 07 10 Ireland SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co. Dublin Phone: 01-403 9000, Fax: 01-464 0500 Portugal SMC Espaa (Sucursal Portugal), S.A.

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in Screw-in Screw-in 05 07 0.5 mm 0.7 mm 06 08 10 12 16 01 02 03 04 6 8 10 12 16 Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum