0.

DIN terminal (Y): VQZ2l2l-lYll1-C4, C6 L-type plug connector (L): VQZ2l2l-lLl1-C4, C6 (Lead wire length) Approx. 300 79 [81.2] 28.8 [35.8] 85.4 Max. 10 45.5 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ2l2l-lMl1-C4, C6 (Lead wire length) 61.4 53.9 42.6 40.1 [47.1] Approx. 300 27.9 69.2 [71.4] 64.2

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Compact Manifold Regulator Series ARM5

ARM5B R 06 A Individual Supply Type 3. Options 1.

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Valve Single Unit

How to Order Port Block Assembly Only replacement of the fittings assembly is possible. 000 6A SY Metric size One-touch fitting for 6 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C6 SX3000 VVQ1000-50A-C4 Series Thread type One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 Symbol Series Nil Rc 3 SX3000 SX5000 VVQ1000-51A-C6 VVQ1000-51A-C8 G F 5 SX5000 N NPT 7 SX7000

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single unit Manifold 2n x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting M3 mounting hole P = 11 M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw Residual pressure release manual override Stations 1 2 3 n D side U side

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

45

U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

45

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

SV

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

Compact Manifold Regulator

Using an electronic type pressure gauge is recommended, depending on the situation. 741 ARM10 Series Flow Rate Characteristics (Representative Values) ARM10F-06-1 ARM10-06-1 (One-touch fittings: IN/OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM10F-06 ARM10-06 (One-touch fittings: IN/OUT 4) 0.7 0.35 0.30 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.25 0.5

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.