Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 10-SS3YJ3-S42-M5 Type 10-SS3YJ3-S42-C4 Base mounted for internal pilot 0.17 0.36 0.3 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 10-SYJ34M 1/8 C4 M5 x 0.8 C4 10-SYJ34M 1/8 Note) The values are for individually operated 2 position type manifold bases.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Base Mounted Metal Seal/Rubber Seal Series VQ

Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 ~ = 4.5 Mounting hole for M3 Mounting hole for M2.5 ~ = 4.5 Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Fieldbus System

14 14 14 14 14 14 14 (5.5) (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

7.5

) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .